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Sputtered Si:H alloys for edge filters: application to thermophotovoltaics

机译:用于边缘滤光片的溅射Si:H合金:在热光伏中的应用

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摘要

Si:H alloys are being investigated for the high-index material in an interference filter to provide spectral control in an application of thermophotovoltaic energy conversion. In particular, a multilayer edge filter is being developed to provide high transmission of photons with wavelengths between 1.0 and 2.4 μm and high reflectance for wavelengths outside this range. Thin films of Si:H were deposited by means of rf reactive sputtering. Deposition parameters were varied to optimize the H content in Si:H coatings such that the refractive index was greater than 3. Optical absorption near 1 μm and Si:H infrared absorptions near 5 and 12 μm were minimized.
机译:正在研究将Si:H合金用于干涉滤光片中的高折射率材料,以在热光伏能量转换的应用中提供光谱控制。尤其是,正在开发一种多层边缘滤光片,以提供波长在1.0到2.4μm之间的光子的高透射率,以及对该范围之外的波长的高反射率。通过射频反应溅射沉积Si:H薄膜。改变沉积参数以优化Si:H涂层中的H含量,以使折射率大于3。将1μm附近的光吸收和5和12μm附近的Si:H红外吸收最小化。

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