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Unified analytical inversion of reflectometric and ellipsometric data of absorbing media

机译:吸收介质的反射和椭圆数据的统一解析反演

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We present a unified two-step analytical inversion of reflectometric and ellipsometric data of absorbing media. Instead of a direct determination of the optical constants n, k from reflectometric or ellipsometric measurements, we first calculate the real and the imaginary part η, γ of the normal component of the wave vector in the absorbing medium. New and simple analytical formulas are obtained for η and γ in terms of ρ_(s), ρ_(p) or tan ψ, δ, respectively, where ρ_(s), ρ_(p) and tan ψ, δ are the measured reflectometric and ellipsometric parameters of the absorbing medium. The optical constants are then easily determined analytically again from η, γ. We use the new formulas to compare the sensitivity with experimental errors due to the inversion of reflectometric and ellipsometric data.
机译:我们提出了吸收介质的反射率和椭圆率数据的统一两步分析反演。代替直接根据反射或椭圆测量确定光学常数n,k,我们首先计算吸收介质中波矢量法线分量的实部和虚部η,γ。分别根据ρ_(s),ρ_(p)或tanψ,δ获得针对η和γ的新的简单解析公式,其中ρ_(s),ρ_(p)和tanψ,δ是测得的反射率吸收介质的椭偏参数。然后可以很容易地再次从η,γ解析地确定光学常数。我们使用新公式将灵敏度与实验误差进行比较,这些误差是由于反射和椭偏数据的倒置引起的。

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