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首页> 外文期刊>Applied optics >HIGH-EFFICIENCY INPUT COUPLING INTO OPTICAL WAVEGUIDES USING GRATINGS WITH DOUBLE-SURFACE CORRUGATION
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HIGH-EFFICIENCY INPUT COUPLING INTO OPTICAL WAVEGUIDES USING GRATINGS WITH DOUBLE-SURFACE CORRUGATION

机译：使用带有双表面波纹的光栅将光输入高效耦合到光学波导中

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摘要

Waveguide grating couplers that have surface corrugation on both boundaries of the waveguide were fabricated by the deposition of waveguide material at high-vacuum pressures onto a surface-relief grating etched into the substrate. A lateral shift between the two gratings along the direction of the common grating vector was created during the waveguide deposition when the substrate normal was tilted with respect to the direction of material deposition. A series of waveguide thicknesses having an identical angle of deposition were examined to observe the effect of the waveguide thickness, and corresponding lateral shift, on the branching ratio and input-coupling efficiency. Branching ratios of above 98% and input-coupling efficiencies near the theoretical limit for an incident Gaussian beam were obtained. [References: 13]
机译：通过在高真空压力下将波导材料沉积到蚀刻到基板中的表面浮雕光栅上，可以制造出在波导的两个边界上都具有表面波纹的波导光栅耦合器。当衬底法线相对于材料沉积方向倾斜时，在波导沉积过程中会沿着公共光栅矢量的方向在两个光栅之间产生横向偏移。检查具有相同沉积角的一系列波导厚度，以观察波导厚度以及相应的横向偏移对分支比和输入耦合效率的影响。获得了高于98％的分支比和接近入射高斯光束理论极限的输入耦合效率。 [参考：13]

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