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Offset of coherent envelope position due to phase change on reflection

机译:由于反射相位变化而导致的相干包络位置偏移

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摘要

Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10-40 nm for metallic surfaces.
机译:当采用干涉技术测试由彼此相邻的不同材料构成的物体时,反射时具有不同相位变化的不同材料会影响表面高度测量。当使用宽带光源进行垂直扫描干涉测量时,我们测试了此相位变化对反射的影响。我们在理论上和实验上表明,相变的色散对反射的强烈线性依赖性保留了条纹的相干包络线的形状,但对于金属表面,其沿光轴移动了大约10-40 nm。

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