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Sensitivity analysis of grating parameter estimation

机译:光栅参数估计的灵敏度分析

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An optimization method for the sensitivity of diffraction efficiency measurements is presented. I define the sensitivity as the estimation precision of the grating parameters. The optimization method called sensitivity analysis for fitting scans all the possible measurement configurations and selects the configuration that yields the best sensitivity. The scan is made over the domain of the experimental parameters of the arrangement, such as the azimuth angle of the grating and the orientation angles of the analyzer and the polarizer. These parameters can be freely varied, and among the multitude of possible combinations there is one configuration that provides optimum sensitivity. Comparison with experimental results reveals a qualitative agreement between theory and practice. (C) 2002 Optical Society of America. [References: 21]
机译:提出了一种优化衍射效率测量灵敏度的方法。我将灵敏度定义为光栅参数的估计精度。用于拟合的优化方法称为灵敏度分析,它会扫描所有可能的测量配置,并选择产生最佳灵敏度的配置。扫描是在装置的实验参数范围内进行的,例如光栅的方位角以及检偏器和偏振器的定向角。这些参数可以自由更改,并且在多种可能的组合中,有一种配置可提供最佳灵敏度。与实验结果的比较揭示了理论与实践之间的定性一致性。 (C)2002年美国眼镜学会。 [参考:21]

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