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Application of a mid-infrared fiber bundle in remote measurement of gas concentrations in a chemical vapor deposition chamber

机译：中红外纤维束在化学气相沉积室内气体浓度远程测量中的应用

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摘要

A fiber bundle has been designed for measurement of gas concentrations in a chemical vapor deposition (CVD) chamber. The bundle is broadband, covering the spectrum range from 500 to 6000 cm~(-1). Using this bundle, we have designed Fourier Transform infrared (FTIR) sampling configurations with reduced beam divergence (from 0.4 to 0.1 rad) and focal spot diameters (from 12 to 4 mm). The FTIR spectrum of tetraethoxysilane vapors in a CVD chamber was determined with the bundle and modified SAM connectors. An ellipsoid reflector was designed that yielded improved signal-to-noise ratios (SNR's) in the fiber-based spectra by a factor of 2. The incorporation of this reflector in spectrometers by use of the fiber bundle has the potential to reduce the sampling times for spectra while retaining acceptable SNR's.
机译：纤维束已设计用于测量化学气相沉积（CVD）室中的气体浓度。该束是宽带的，覆盖了从500到6000 cm〜（-1）的光谱范围。使用此束，我们设计了傅里叶变换红外（FTIR）采样配置，以减少光束发散（从0.4到0.1 rad）和焦点直径（从12到4 mm）。用束和改进的SAM连接器确定CVD室中四乙氧基硅烷蒸气的FTIR光谱。设计了一种椭圆形反射镜，可以将基于光纤的光谱中的信噪比（SNR）提高2倍。通过使用光纤束将该反射镜结合到光谱仪中，有可能减少采样时间在保留可接受的SNR的同时对光谱进行校正。

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