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Effect of wave-number error on the computation of path-length delay in white-light interferometry

机译:波数误差对白光干涉法中光程延迟计算的影响

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We analyze the error in computed optical path-length delay when using a phase-shifting interferometry (PSI) algorithm with an error in the operating wavelength. The delay error decomposes into two terms. The first is the error in the conversion from a phase measurement to the delay because of the incorrect wavelength, and the second is the error made in the phase measurement itself that is due to the wavelength error. The most important aspect of this investigation is to ascertain this latter error. A general characterization is obtained, and a particularly simple formula is developed for the special case of least-squares estimation involving only the ratio of the wave-number error to the wave number and a multiplicative factor that is an a priori computable nonlinear function of the ratio of the modulator stroke length to the operating wavelength. Because the ultimate path-length error is a function of the two terms, a new set of PSI algorithms that compensate the computed phase error to cancel the conversion error is developed. Numerical simulations are presented to validate the analysis and establish the insensitivity of the new algorithms to wave-number error.
机译:当使用相移干涉测量法(PSI)算法且工作波长存在误差时,我们将分析计算出的光程长度延迟中的误差。延迟误差分解为两个项。第一个是由于波长不正确导致的从相位测量到延迟转换的误差,第二个是由于波长误差在相位测量本身中产生的误差。此调查最重要的方面是确定后一个错误。对于一般的最小二乘估计而言,获得了一般特征,并开发了一个特别简单的公式,该估计仅涉及波数误差与波数的比值和作为乘数的先验可计算非线性函数的乘数。调制器冲程长度与工作波长之比。由于最终路径长度误差是这两项的函数,因此开发了一组新的PSI算法,该算法可补偿计算出的相位误差以消除转换误差。数值模拟被提出来验证分析并建立新算法对波数误差的不敏感性。

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