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首页> 外文期刊>Applied optics >Experimental comparison of a liquid-crystal point-diffraction interferometer (LCPDI) and a commercial phase-shifting interferometer and methods to improve LCPDI accuracy
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Experimental comparison of a liquid-crystal point-diffraction interferometer (LCPDI) and a commercial phase-shifting interferometer and methods to improve LCPDI accuracy

机译：液晶点衍射干涉仪（LCPDI）与商用相移干涉仪的实验比较以及提高LCPDI精度的方法

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摘要

We compare the phase measurements of a fused-silica witness sample made with a liquid-crystal point-diffraction interferometer (LCPDI) with measurements made with a Zygo Mark IV xp phase-shifting interferometer and find close agreement. Two phase-shift-error sources in the LCPDI that contribute to measurement discrepancies are frame-to-frame intensity changes caused by the dichroism of the dye and aligmnent distortions of the host liquid crystal. An empirical model of the phase-shift error caused by the host alignment distortions is presented and used to investigate the performance of two different phase-detection algorithms, It is suggested that by proper choice of LCPDI fabrication parameters and phase-acquisition methods, the device's accuracy can be significantly improved. (C) 2002 Optical Society of America. [References: 32]
机译：我们将液晶点衍射干涉仪（LCPDI）制成的熔融石英见证样品的相位测量结果与Zygo Mark IV xp相移干涉仪进行的测量结果进行比较，并找到了一致的结论。 LCPDI中导致测量差异的两个相移误差源是由染料的二色性和主体液晶的适当畸变引起的帧间强度变化。提出了由主机对准畸变引起的相移误差的经验模型，并用于研究两种不同的相位检测算法的性能。建议通过适当选择LCPDI制造参数和相位获取方法，器件的准确性可以大大提高。 （C）2002年美国眼镜学会。 [参考：32]

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