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Signal evaluation for high-speed confocal measurements

机译:高速共焦测量的信号评估

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The confocal-detection principle is open especially for use in medical applications. For inspection systems applications for technical objects in reflection confocal setups are of growing importance. For such applications the confocal measurements need to have a very short measuring time. A fast detection system is needed and to satisfy this requirement only a small number of height levels are measured and a fast-evaluation algorithm is used. Drawbacks of the reduction of height levels are a greater influence of noise and additional systematic errors on the measured heights. Study the effects of the reduction are calculated, different evaluation algorithms are analyzed, and the optimization of the parameters is discussed. (C) 2002 Optical Society of America. [References: 10]
机译:共聚焦检测原理是开放的,特别是在医疗应用中。对于检查系统,反射共焦设置中技术对象的应用变得越来越重要。对于此类应用,共焦测量需要非常短的测量时间。需要一种快速检测系统,并且为了满足此要求,仅测量少量的高度水平,并使用一种快速评估算法。降低高度水平的弊端是噪声和其他系统误差对所测量高度的更大影响。研究了减少量的影响,计算了不同的评估算法,并讨论了参数的优化。 (C)2002年美国眼镜学会。 [参考:10]

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