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CHANNEL-OPTICAL-WAVEGUIDE FABRICATION BASED ON ELECTRON-BEAM IRRADIATION OF POLYIMIDES

机译:基于聚酰亚胺的电子束辐照的光导波导制造

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摘要

A new-channel-waveguide-fabrication process for use with polyimide is described. The new technique uses an electron-bean-induce effect to alter the refractive index of the polyimides directly. Channel waveguides with an 8-mu m-wide, 8-mu m-deep core have been fabricated on a polyimide film by the use of electron-beam irradiation. Only one kind of polyimide (GFDA/TFDB) was used in this waveguide. The difference in refractive index between the core and the cladding was approximately 0.30% for both TE-and TM-polarized incident light when the dose was 1500 mu C/cm(2), which was sufficient to produce waveguides. The optical properties of the waveguide are also demonstrated. [References: 31]
机译:描述了一种与聚酰亚胺一起使用的新通道波导制造工艺。这项新技术利用电子诱导豆效应直接改变聚酰亚胺的折射率。通过使用电子束辐照,在聚酰亚胺膜上制造了具有8μm宽,8μm深的纤芯的通道波导。该波导仅使用一种聚酰亚胺(GFDA / TFDB)。当剂量为1500μC / cm(2)时,TE和TM偏振入射光的纤芯和包层之间的折射率差约为0.30%,这足以产生波导。还展示了波导的光学特性。 [参考:31]

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