EXCIMER LASER USE FOR MICROETCHING COMPUTER-GENERATED HOLOGRAPHIC STRUCTURES

Vainos NA.; Pissadakis S.; Boutsikaris L.; Parmiter PJM. Dainty P.; Hall TJ.; Mailis S.

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EXCIMER LASER USE FOR MICROETCHING COMPUTER-GENERATED HOLOGRAPHIC STRUCTURES

机译：准分子激光在微刻蚀计算机生成的全息结构中的使用

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Excimer-laser microetching of a variety of materials is applied to the fabrication of surface-relief optical microstructures of arbitrary morphology, with particular emphasis on computer-generated holographic structures. High-definition, high-radiation-intensity selective laser ablative etching in conjunction with step-and-repeat (period) replication or raster (pixel) scanning is used. To support such developments, the characteristic etching properties of a wide range of solid materials, from metals to semiconductors and polymers, are studied. Optical-interconnect and generic object holograms are produced by means of this alternative one-step holographic information-recording method. (C) 1996 Optical Society of America [References: 44]

机译：多种材料的准分子激光微蚀刻技术被用于制造任意形态的表面浮雕光学微结构，尤其是计算机生成的全息结构。使用高清晰度，高辐射强度的选择性激光烧蚀蚀刻，以及分步重复（周期）复制或光栅（像素）扫描。为了支持这种发展，研究了从金属到半导体和聚合物的各种固体材料的特征蚀刻特性。通过这种另一种单步全息信息记录方法可以产生光学互连和通用对象全息图。（C）1996年美国眼镜学会[参考文献：44]

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《Applied optics》 |1996年第32期|共16页
作者
Vainos NA.; Pissadakis S.; Boutsikaris L.; Parmiter PJM. Dainty P.; Hall TJ.; Mailis S.;
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正文语种 eng
中图分类光学;
关键词
Computer-generated holograms; optical interconnects; micro-optics; excimer lase; R; materials; Processing; Diffractive optical-elements; Microlens arrays; Fabrication; Lithography; Ablation; Components; Resist;

机译：计算机生成的全息图;光学互连;微光学;准分子激光;R;材料;加工;衍射光学元件;微透镜阵列;制造;光刻;烧蚀;组件;抗蚀剂;

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1. EXCIMER LASER USE FOR MICROETCHING COMPUTER-GENERATED HOLOGRAPHIC STRUCTURES [J] . Vainos NA., Pissadakis S., Boutsikaris L., Applied optics . 1996,第32期

机译：准分子激光在微刻蚀计算机生成的全息结构中的使用
2. High-reflectivity Bragg gratings fabricated by 248-nm excimer laser holographic ablation in thin Ta_2O_5 films overlaid on glass waveguides [J] . S. PISSADAKIS, M.N. ZERVAS, L. REEKIE, Applied Physics. A, Materials Science & Processing . 2004,第4a6期

机译：在玻璃波导上覆盖的Ta_2O_5薄膜中通过248 nm准分子激光全息烧蚀制造的高反射率布拉格光栅
3. Holographic interferometry of excimer-laser-ablated bovine eyes: first results. [J] . Forster W, Stupp T, Kasprzak H Ophthalmologica: International Journal of Ophthalmology=Journal International d'Ophtalmologie . 2003,第1期

机译：准分子激光烧蚀牛眼的全息干涉术：第一个结果。
4. Computer-generated holographic diffractive structures fabricated by direct excimer laser microetching [C] . Leonidas Boutsikaris, Foundation for Research, Technology/Hellas, Laser-Induced Thin-Film Processing . 1995

机译：通过直接受激准分子激光微蚀刻制造的计算机生成的全息衍射结构
5. Particle Generation by Pulsed Excimer Laser Ablation in Liquid: Hollow Structures and Laser-Induced Reactions. [D] . Yan, Zijie. 2011

机译：脉冲受激准分子激光烧蚀在液体中产生的颗粒：空心结构和激光诱导的反应。
6. Preparation of periodic surface structures on doped poly(methyl metacrylate) films by irradiation with KrF excimer laser [O] . Yevgeniya Kalachyova, Oleksiy Lyutakov, Petr Slepicka, 2014

机译：用KrF准分子激光辐照在掺杂的聚甲基丙烯酸甲酯薄膜上制备周期性表面结构
7. High-reflectivity Bragg gratings fabricated by 248-nm excimer laser holographic ablation in thin Ta2O5 films overlaid on glass waveguides [O] . S. Pissadakis, M.N. Zervas, L. Reekie, 2004

机译：在薄Ta2O5薄膜上覆盖在玻璃波导的薄Ta2O5薄膜中制造的高反射率布拉格光栅
8. Controls of Aeronautical Structures under Fatigue Testing by Holographic Pulsed Lasers Interferometry [R] . Fagot, H., Albe, F., Smigielski, P., 1979

机译：全息脉冲激光干涉测量疲劳试验中的航空结构控制

EXCIMER LASER USE FOR MICROETCHING COMPUTER-GENERATED HOLOGRAPHIC STRUCTURES

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