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MULTILAYER WAVEGUIDE-GRATING FILTERS

机译：多层波导光栅滤光片

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摘要

The properties of guided-mode resonance reflection filters constructed with multiple thin-film layers are addressed. Greatly improved filter characteristics are shown to follow by the incorporation of multiple homogeneous layers with the spatially modulated layer. Calculated results for single-layer, double-layer, and triple-layer filter structures are presented. Whereas good filter characteristics are obtainable with single layers that are half-resonance-wavelength thick, there remains a residual reflection in the sidebands unless the cover and the substrate permittivities are equal. With double-layer and triple-layer designs, extensive wavelength ranges with low sideband-reflectance values are shown to be possible without requiring equal cover and substrate permittivities. The antireflection properties of the layer stack can be understood if the modulated layer is modeled as a homogeneous layer characterized by its average relative permittivity. However, as the grating-modulation index increases, this approximation deteriorates. In particular it is found that, for a given high modulation index, the double-layer antireflection thin-film approximation fails, whereas for the same modulation in a triple-layer system it holds firmly. Multilayer designs can thus have significantly large filter passbands, as they may contain heavily modulated resonant gratings without corruption of the ideal filter characteristics. [References: 19]
机译：解决了由多个薄膜层构成的导模共振反射滤光片的特性。通过将多个同质层与空间调制层相结合，可以显着改善滤波器的性能。给出了单层，双层和三层滤波器结构的计算结果。尽管使用半共振波长厚的单层可以获得良好的滤光特性，但除非覆盖层和基材的介电常数相等，否则在边带中仍会残留反射。对于双层和三层设计，显示出具有低边带反射率值的宽波长范围是可能的，而无需相等的覆盖层和基板介电常数。如果将调制层建模为以其平均相对介电常数为特征的均质层，则可以理解叠层的抗反射特性。但是，随着光栅调制指数的增加，该近似度变差。特别地，发现对于给定的高调制指数，双层抗反射薄膜近似法失败，而对于三层系统中的相同调制，它牢固地保持住。多层设计因此可以具有相当大的滤波器通带，因为它们可以包含经过严格调制的谐振光栅，而不会破坏理想的滤波器特性。 [参考：19]

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