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首页> 外文期刊>International Journal of Computer Integrated Manufacturing >Cluster tool module communication based on a high-level fieldbus
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Cluster tool module communication based on a high-level fieldbus

机译：基于高级现场总线的集群工具模块通信

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摘要

A cluster tool for semiconductor manufacturing is an integrated device that consists of several single wafer processing modules and a wafer transport module based on a robot. The distributed module controllers are integrated by an inter-module communication network and are coordinated by a centralized controller, called a cluster tool controller (CTC). Since the CTC monitors and coordinates the distributed complex module controllers for advanced process control, complex communication messaging and services between the CTC and the module controllers are required. A SEMI standard, CTMC (cluster tool module communication), specifies application-level communication service requirements for inter-module communication. We propose the use of high-level fieldbuses-for instance, PROFIBUS-FMS-for implementing CTMC since the high-level fieldbuses are well suited for complex real-time distributed manufacturing control applications. We present a way of implementing CTMC using PROFIBUS-FMS as the communication enabler. We first propose improvements of a key object of CTMC for material transfer and the part transfer protocol to meet the functional requirements of modern advanced cluster tools. We also discuss mapping objects and services of CTMC to PROFIBUS-FMS communication objects and services. Finally, we explain how to implement the mappings.
机译：用于半导体制造的集群工具是一种集成设备，由多个单个晶圆处理模块和一个基于机器人的晶圆运输模块组成。分布式模块控制器由模块间通信网络集成，并由称为群集工具控制器（CTC）的集中控制器进行协调。由于CTC监视并协调分布式复杂模块控制器以进行高级过程控制，因此需要CTC与模块控制器之间的复杂通信消息传递和服务。 SEMI标准CTMC（集群工具模块通信）规定了模块间通信的应用程序级通信服务要求。我们建议使用高级现场总线（例如PROFIBUS-FMS）来实现CTMC，因为高级现场总线非常适合复杂的实时分布式制造控制应用。我们提出了一种使用PROFIBUS-FMS作为通信使能器来实现CTMC的方法。我们首先提出对CTMC的关键目标进行改进，以实现材料转移和零件转移协议，以满足现代高级群集工具的功能要求。我们还将讨论将CTMC映射到PROFIBUS-FMS通信对象和服务的对象和服务。最后，我们解释如何实现映射。

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