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首页> 外文期刊>International Journal of High Speed Electronics and Systems: Devices, Integrated Circuits and Systems, Optical and Quantum Electronics >OPTICAL MEMS TECHNOLOGIES FOR ELECTRICALLY TUNABLE MULTI-SPECTRAL SHORT-WAVE INFRARED SENSORS AND ARRAYS
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OPTICAL MEMS TECHNOLOGIES FOR ELECTRICALLY TUNABLE MULTI-SPECTRAL SHORT-WAVE INFRARED SENSORS AND ARRAYS

机译：用于电可调多光谱短波红外传感器和阵列的光学MEMS技术

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摘要

Optical MEMS technology combined with broadband infrared sensor technology is used to realize wavelength-tunable infrared sensors. This paper describes the ongoing research into one such sensor design based on an electrically tunable Fabry-Perot cavity. Theory, measured results and future research directions are presented and discussed for the single-sensor design currently being developed, in the context of the intended application of this technology; the development of lightweight, portable and robust multi-spectral imaging systems.
机译：光学MEMS技术与宽带红外传感器技术相结合，用于实现波长可调红外传感器。本文介绍了一种基于电可调Fabry-Perot腔的传感器设计的正在进行的研究。在此技术的预期应用范围内，介绍和讨论了当前正在开发的单传感器设计的理论，测量结果和未来的研究方向;开发轻巧，便携和强大的多光谱成像系统。

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