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首页> 外文期刊>International Journal of Nanotechnology >Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity
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Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity

机译：集成光栅和可调法布里-珀罗腔的基于MEMS的微滤波器设计

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摘要

This paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length.
机译：本文介绍了将可调谐法布里-珀罗（FP）腔和光栅集成在一起的新型微机电系统（MEMS）滤波器的基本设计和工作原理。它基于可调FP腔的滤波效果以及光栅针对不同波长的空间分离功能。两个设备的组合可以拓宽传统FP滤波器的光谱范围，而不会影响其光谱线宽。已经设计了基于硅玻璃结合结构的MEMS滤波器配置。 FP腔长度取决于硅晶片本身的厚度以实现长腔长度。 T-S悬臂可以减小微镜变形，并适当降低驱动电压。计算结果表明，在长腔体长度的情况下，可以同时获得较窄的线宽和较宽的光谱范围。

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