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首页> 外文期刊>International Journal of Mechanical Sciences >Investigation of a 3-DOF micro-positioning table for surface grinding
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Investigation of a 3-DOF micro-positioning table for surface grinding

机译：用于表面磨削的3自由度微定位台的研究

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摘要

A novel three degree of freedom numerically controlled micro-positioning table has been developed, optimized for applications such as improving the machining precision of precision grinders. The table consists of a moving platform, coupled to a base, three piezoelectric actuators and three capacitive sensors. An elastic structure with three notch-type flexure hinges both guides the platform and generates a preload for the piezoelectric actuators. The dimensions of the platform and flexure hinges and the position of flexure hinges are designed with the aid of finite element modeling to provide good stiffness with little bending deformation of the platform. The inverse model of the table is developed for numerical control. Experimental results are compared to the model predictions. The table has a natural frequency of 584 Hz, a resolution of 6 nm, an open loop control stiffness of 104 N/μm at the center of the moving platform and a closed loop control stiffness of 650N/μm across the working area of the table.
机译：已经开发出一种新颖的三自由度数控微定位工作台，并针对诸如提高精密磨床的加工精度等应用进行了优化。该工作台包括一个与底座相连的移动平台，三个压电致动器和三个电容式传感器。具有三个缺口型挠性铰链的弹性结构既可引导平台，又可为压电致动器产生预紧力。平台和挠性铰链的尺寸以及挠性铰链的位置借助于有限元建模来设计，以提供良好的刚度而平台的弯曲变形很小。该表的逆模型是为数控而开发的。将实验结果与模型预测进行比较。工作台的固有频率为584 Hz，分辨率为6 nm，活动平台中心的开环控制刚度为104 N /μm，工作台整个区域的闭环控制刚度为650N /μm 。

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