Plasma Chemical Vapour Deposition of Aluminium Oxide on Hardmetals

Tabersky R.; Berg H.

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Plasma Chemical Vapour Deposition of Aluminium Oxide on Hardmetals

机译：硬质合金上氧化铝的等离子体化学气相沉积

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Tests were carried out on A1203 coatings which had been deposited on hardmetals using a new plasma CVD technique. With this technique hard crystalline A1203 layers with good adhesion properties were obtained at temperatures over 450-650deg C The coatings display a very fine-grained microstructure and, owing to the low coating temperatures, have only a very small influence on the toughness of the coated hardmetals. It was possible in various cutting tests to demonstrate the excellent tool life of indictable inserts coated with A1_2O_3 by PCVD.

机译：使用新的等离子体CVD技术对已沉积在硬质金属上的A1203涂层进行了测试。通过这种技术，在超过450-650°C的温度下获得了具有良好粘合性能的硬质晶体A1203层。该涂层显示出非常细的微观结构，由于涂层温度低，对涂层的韧性影响很小。硬质合金。在各种切削测试中都有可能证明通过PCVD涂覆有A1_2O_3的可起诉刀片的出色刀具寿命。

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《International Journal of Refractory Metals & Hard Materials》 |1996年第3期|共6页
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Tabersky R.; Berg H.;
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中图分类有色金属及其合金;
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1. Plasma Chemical Vapour Deposition of Aluminium Oxide on Hardmetals [J] . Tabersky R., Berg H. International Journal of Refractory Metals & Hard Materials . 1996,第1a3期

机译：硬质合金上氧化铝的等离子体化学气相沉积
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3. Characterisation and Electrochemical Evaluation of Plasma Electrolytic Oxidation Coatings on Magnesium with Plasma Enhanced Chemical Vapour Deposition Post-Treatments [J] . Sun Ming, Yerokhin Aleksey, Matthews Allan, Plasma processes and polymers . 2016,第2期

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7. Tribological Properties of Coatings Applied on Near-Nano and Nanostructured WC-Co Hardmetals by Using Plasma-Assisted Chemical Vapour Deposition Technique [O] . Matija Sakoman, Danko Ćorić, Tamara Aleksandrov Fabijanić, 2020

机译：用等离子体辅助化学气相沉积技术应用近纳米和纳米结构WC-CO硬质合金涂层的摩擦学特性
8. The Role of Plasma in Plasma Enhanced Chemical Vapour Deposition of Nanostructure Growth [R] . Hash, David B., Meyyappan, M., Teo, Kenneth B. K., 2004

机译：等离子体在等离子体增强化学气相沉积纳米结构生长中的作用

Plasma Chemical Vapour Deposition of Aluminium Oxide on Hardmetals

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