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Mobility Assessment of Depletion-Mode Oxide Thin-Film Transistors Using the Comprehensive Depletion-Mode Model

机译:使用综合耗尽模式模型评估耗尽型氧化物薄膜晶体管的迁移率

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In an enhancement-mode, n-channel (p-channel) oxide thin-film transistor (TFT), current arises as a consequence of electron (hole) transport within a narrow accumulation layer. The square-law model accurately describes enhancement-mode TFT behavior and establishes the equations appropriate for carrier mobility extraction. In contrast, in a depletion-mode oxide TFT, carrier transport can occur within an accumulation layer and/or within the 'bulk' portion of the channel. The comprehensive depletion-mode model accurately describes depletion-mode TFT behavior and establishes a set of equations, different from those obtained from square-law theory, which can be used for carrier mobility extraction. Simulation reveals that when square-law theory mobility extraction equations are used to assess depletion-mode TFTs, the estimated interface mobility is often overestimated.
机译:在增强模式的n沟道(p沟道)氧化物薄膜晶体管(TFT)中,电流是由于电子(空穴)在狭窄的累积层内传输而产生的。平方律模型准确地描述了增强模式TFT的行为,并建立了适用于载流子迁移率提取的方程式。相反,在耗尽型氧化物TFT中,载流子传输可以发生在沟道的累积层内和/或沟道的“体”内。全面的耗尽模式模型准确描述了耗尽模式TFT的行为,并建立了与平方律理论不同的一组方程式,这些方程式可用于载流子迁移率提取。仿真表明,当使用平方律理论迁移率提取方程式来评估耗尽型TFT时,通常会高估估计的接口迁移率。

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