A Basic Study of Defect Inspection Methods for ASIC Manufacturing Line (Second Report: Inspection Parameter Dependence on Yield and Cleaning Cycle)

KOICHI SAKURAI; SUSUMU FUJII; TOSHIYA KAIHARA

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A Basic Study of Defect Inspection Methods for ASIC Manufacturing Line (Second Report: Inspection Parameter Dependence on Yield and Cleaning Cycle)

机译：ASIC生产线缺陷检查方法的基础研究（第二份报告：检查参数取决于产量和清洗周期）

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The results of strict defect control include both the enhancement of manufacturing yield and increased delivery delay due to a drop in the machine operation rate. Therefore, defect inspection methods must be optimized for this trade-off, especially for ASIC manufacturing. In the first paper, we proposed a new manufacturing model which treats not only inspection and the yield model, but also the workflow model. In this paper, we formulate the inspection parameter dependence on the manufacturing yield and the machine cleaning cycle, which may affect delivery time. By using the resulting formulas, factory engineers can obtain practical information for inspection parameter optimization.

机译：严格缺陷控制的结果既包括提高生产良率，又由于降低机器运行速度而增加了交货延迟。因此，必须针对这种折衷优化缺陷检查方法，尤其是对于ASIC制造而言。在第一篇论文中，我们提出了一种新的制造模型，该模型不仅处理检验和成品率模型，而且还处理工作流模型。在本文中，我们根据生产良率和机器清洁周期来制定检查参数，这可能会影响交货时间。通过使用得出的公式，工厂工程师可以获取有关检验参数优化的实用信息。

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来源
《Electrical engineering in Japan》 |2004年第2期|共10页
作者
KOICHI SAKURAI; SUSUMU FUJII; TOSHIYA KAIHARA;
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原文格式 PDF
正文语种 eng
中图分类电机;
关键词
ASIC; LSI; Manufacturing technology; Work flow; Yield; Defect inspection;

机译：ASIC;LSI;制造技术;工作流程;良率;缺陷检查;

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1. A Basic Study of Defect Inspection Methods for ASIC Manufacturing Line (Second Report: Inspection Parameter Dependence on Yield and Cleaning Cycle) [J] . KOICHI SAKURAI, SUSUMU FUJII, TOSHIYA KAIHARA Electrical engineering in Japan . 2004,第2期

机译：ASIC生产线缺陷检查方法的基础研究（第二份报告：检查参数取决于产量和清洗周期）
2. Inspection of Short-Defects on the Surface of Non-Magnetic Square Billets Using an Induction Heating Inspection Method (Analysis by the Finite Element Method) [J] . Toshio Endo, Daisuke Hebiishi, Kanju Nakahara 電気製鋼 . 2003,第3期

机译：使用感应加热检查方法检查非磁方坯表面的短缺（通过有限元法分析）
3. PIPELINE INSPECTION USING A TORSIONAL GUIDED-WAVES INSPECTION SYSTEM. PART 2: DEFECT SIZING BY THE WAVE FINITE ELEMENT METHOD [J] . M. KHARRAT, M. N. ICHCHOU, O. BAREILLE, International journal of applied mechanics . 2014,第4期

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4. Implementation of an effective defect inspection system in a multi product foundry: SM: Smart manufacturing, CFM: Contamination free manufacturing, DI: Defect inspection and reduction, FA: Factory automation/optimization [C] . Armando Anaya, Anthony Singh, Patrick Warner, Annual SEMI Advanced Semiconductor Manufacturing Conference . 2017

机译：在多产品铸造厂中实施有效的缺陷检查系统：SM：智能制造，CFM：无污染制造，DI：缺陷检查和减少，FA：工厂自动化/优化
5. Happy Face, Clean Place?: How Emoji Presence Affects the Interpretation of Restaurant Inspection Reports [D] . Ray, Elizabeth Cate. 2020

机译：幸福的脸，干净的地方？：emoji的存在如何影响餐馆检查报告的解释
6. Effectiveness of visual inspection compared with non-microbiologic methods to determine the thoroughness of post-discharge cleaning [O] . Graham M Snyder, Aleah D Holyoak, Katharine E Leary, 2013

机译：目视检查与非微生物方法相比确定放电后清洁的彻底性的有效性
7. Defect reduction by improving inspection of UML diagrams in the GPRS project : a study of available techniques and "state-of-the-practice" in the GPRS project for inspection of UML diagrams ; experimenting a suggested method to reduce defect cost by early detection of defects [O] . Bunde Geir Arne, Pedersen Anders 2002

机译：通过改进GPRS项目中的UML图检查来减少缺陷：研究GPRS项目中用于UML图检查的可用技术和“实践状态”；实验建议的方法以通过早期发现缺陷来降低缺陷成本

A Basic Study of Defect Inspection Methods for ASIC Manufacturing Line (Second Report: Inspection Parameter Dependence on Yield and Cleaning Cycle)

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