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首页> 外文期刊>Electrophoresis: The Official Journal of the International Electrophoresis Society >SU-8 as a structural material for labs-on-chips and microelectromechanical systems
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SU-8 as a structural material for labs-on-chips and microelectromechanical systems

机译：SU-8作为芯片实验室和微机电系统的结构材料

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摘要

Since its introduction in the nineties, the negative resist SU-8 has been increasingly used in micro- and nanotechnologies. SU-8 has made the fabrication of high-aspect ratio structures accessible to labs with no high-end facilities such as X-ray lithography systems or deep reactive ion etching systems. These low-cost techniques have been applied not only in the fabrication of metallic parts or molds, but also in numerous other micromachining processes. Its ease of use has made SU-8 to be used in many applications, even when high-aspect ratios are not required. Beyond these pattern transfer applications, SU-8 has been used directly as a structural material for microelectromechanical systems and microfluidics due to its properties such as its excellent chemical resistance or the low Young modulus. In contrast to conventional resists, which are used temporally, SU-8 has been used as a permanent building material to fabricate microcomponents such as cantilevers, membranes, and microchannels. SU-8-based techniques have led to new low-temperature processes suitable for the fabrication of a wide range of objects, from the single component to the complete lab-on-chip. First, this article aims to review the different techniques and provides guidelines to the use of SU-8 as a structural material. Second, practical examples from our respective labs are presented.
机译：自从90年代问世以来，负光刻胶SU-8已越来越多地用于微米和纳米技术中。 SU-8使得高纵横比结构的制造对于没有高端设施（例如X射线光刻系统或深反应离子刻蚀系统）的实验室来说是可以访问的。这些低成本技术不仅已应用于金属零件或模具的制造中，而且已应用于许多其他微加工过程中。它的易用性使SU-8可以在许多应用中使用，即使不需要高长宽比时也是如此。除了这些图案转移应用之外，SU-8由于其诸如优异的耐化学性或低杨氏模量等特性，已直接用作微机电系统和微流体的结构材料。与暂时使用的常规抗蚀剂相比，SU-8已被用作永久建筑材料来制造微组件，例如悬臂，膜和微通道。基于SU-8的技术导致了新的低温工艺，适用于从单个组件到完整的芯片实验室的各种物体的制造。首先，本文旨在回顾不同的技术，并为使用SU-8作为结构材料提供指导。其次，给出了来自我们各自实验室的实际示例。

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