A Self-Calibration Method of Microbolometer With Vacuum Package

Liu Chao; Fu Jianyu; Hou YingZhou QiongChen Dapeng

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A Self-Calibration Method of Microbolometer With Vacuum Package

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摘要

Microbolometer is often packaged in a vacuum atmosphere of < 1 Pa to improve its response. The internal pressure of vacuum package always drifts over time. This will lead to the response degradation of microbolometer. To maintain excellent performance and improve device lifetime, a self-calibration method of microbolometer with vacuum package is presented. This method uses the relative change rate obtained by self-heating response to calibrate the IR response according to the linear dependence of self-heating response and IR response at different pressures. Its validity is verified using a microbolometer with series diodes. The degraded IR voltage responses can be corrected to the normal value when the internal pressure increases from 1 Pa to 500 Pa. Furthermore, the relative standard of calibration deviation is small when the internal pressure is no more than 50 Pa.

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来源
《IEEE sensors journal》 |2020年第15期|8570-8575|共6页
作者
Liu Chao; Fu Jianyu; Hou YingZhou QiongChen Dapeng;
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作者单位

Chinese Acad Sci, Inst Microelect, Key Lab Microelect Device & Integrated Technol, Beijing 100029, Peoples R China;

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原文格式 PDF
正文语种英语
中图分类电工技术;
关键词
Thermal conductivity; Temperature measurement; Heating systems; Sensors; Voltage measurement; Calibration; Silicon; Microbolometer; response degradation; self-calibration; vacuum package;

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A Self-Calibration Method of Microbolometer With Vacuum Package

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