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Influence of Time Domain Parameters on Unipolar Pulse Plasma System Transition State

机译：时域参数对单极脉冲等离子体系统过渡态的影响

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摘要

Plasma surface treatment of large components like wind turbine parts require large vacuum vessels and high power supplies. Our analysis of the electrical response of a unipolar pulse plasma system has shown that the transition of the gas discharge to the stationary state is related not only to the gas discharge properties but also to switching circuit and interconnection line characteristics. As a consequence the same power supply connected to different working chambers may perform in different way. We found that the gas discharge transition state depends on the switching transistor properties, gas mixture, operating pressure, cathode temperature, cathode physical properties, etc. The time domain parameters are in relation with the gas discharge equivalent dynamic resistance, equivalent capacitance, parasitic interconnection inductance, etc. Pulse plasma provides reliable operation but also a new type of unhomogeneity due to the gas discharge periodical transition to the stationary state. The designs of a pulse power supply and its connection to the process chamber are found of importance for homogeneous surface treatment in processes like plasma nitriding. From modeling and simulation of a pulse plasma system based on the measurements, the important electrical parameters of the system were obtained.
机译：大型零件（如风力涡轮机零件）的等离子表面处理需要大型真空容器和大功率电源。我们对单极脉冲等离子体系统的电响应的分析表明，气体放电到静止状态的过渡不仅与气体放电特性有关，而且与开关电路和互连线路的特性有关。结果，连接到不同工作室的相同电源可以以不同方式执行。我们发现，气体放电过渡态取决于开关晶体管的特性，气体混合物，工作压力，阴极温度，阴极物理特性等。时域参数与气体放电等效动电阻，等效电容，寄生互连有关。脉冲等离子体不仅提供可靠的操作，而且由于气体放电会周期性地过渡到固定状态，因此还提供了一种新型的不均匀性。发现脉冲电源的设计及其与处理室的连接对于等离子体氮化等过程中的均匀表面处理非常重要。通过基于测量结果的脉冲等离子体系统的建模和仿真，获得了系统的重要电参数。

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