Modeling the Growth of Thin-Film Surfaces

V. A. Vasil’ev; P. S. Chernov

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Modeling the Growth of Thin-Film Surfaces

机译：模拟薄膜表面的生长

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Simulation of the growth of thin-film surfaces is considered. A brief review of the existing approaches and models is made. An original model of the growth of thin-film surfaces is proposed, which comprises a stochastic cellular automat and enables one to study the influence of the substrate temperature and the deposition rate and time on the parameters characterizing the morphology of the surface. The results of the modeling are compared with the data of atomic-force microscopy of experimentally produced thin films.

机译：考虑薄膜表面生长的模拟。对现有方法和模型进行了简要回顾。提出了一种薄膜表面生长的原始模型，该模型包括一个随机的细胞自动机，使人们能够研究衬底温度，沉积速率和时间对表征表面形态的参数的影响。将建模结果与实验生产的薄膜的原子力显微镜数据进行比较。

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《Mathematical models and computer simulations》 |2012年第6期|共7页
作者
V. A. Vasil’ev; P. S. Chernov;
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原文格式 PDF
正文语种 eng
中图分类数学;
关键词
surface growth; thin films; stochastic cellular automat; morphology parameters;

机译：表面生长;薄膜;随机细胞自动机;形态学参数;

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专利

1. Modeling the Growth of Thin-Film Surfaces [J] . V. A. Vasil’ev, P. S. Chernov Mathematical models and computer simulations . 2012,第6期

机译：模拟薄膜表面的生长
2. Mathematical Modeling of Nonisothermal Thin-Film Two-Phase Flow over Permeable Surfaces [J] . F. G. Akhmadiev, R. R. Fazylzyanov, R. A. Galimov Theoretical foundations of chemical engineering . 2012,第6期

机译：透水表面非等温薄膜两相流的数学建模
3. Interactions between radical growth precursors on plasma-deposited silicon thin-film surfaces [J] . Tamas Bakos, Mayur S.Valipa, Dimitrios Maroudas The Journal of Chemical Physics . 2007,第11期

机译：等离子体沉积的硅薄膜表面上自由基生长前体之间的相互作用
4. Optimisation of periodic surface textures in thin-film silicon solar cells using rigorous optical modelling by considering realistic layer growth [C] . Martin Sever, Janez Krc, Marko Topic E-MRS Spring Meeting on Advancesd Inorganic Materials and Structures for Photovoltaics . 2014

机译：考虑现实层生长，使用严格的光学建模优化薄膜硅太阳能电池周期性纹理纹理
5. Temporal evolution of surface structure and morphology in thin-film growth and etching processes. [D] . Drotar, Jason Todd. 2002

机译：薄膜生长和蚀刻过程中表面结构和形态的时间演变。
6. Donor–acceptor stacking arrangements in bulk and thin-film high-mobility conjugated polymers characterized using molecular modelling and MAS and surface-enhanced solid-state NMR spectroscopy [O] . Sachin R. Chaudhari, John M. Griffin, Katharina Broch, 2017

机译：本体和薄膜高迁移率共轭聚合物中的供体-受体堆叠结构使用分子建模MAS和表面增强型固态NMR光谱进行表征
7. Optimisation of Periodic Surface Textures in Thin-film Silicon Solar Cells Using Rigorous Optical Modelling by Considering Realistic Layer Growth [O] . Sever Martin, Krč Janez, Topič Marko 2014

机译：考虑到实际的层生长，使用严格的光学模型优化薄膜硅太阳能电池的周期性表面纹理
8. Automation, Control and Modeling of Compound Semiconductor Thin-Film Growth [R] . Breiland, W. G. , Coltrin, M. E. , Drummond, T. J. , 1999

机译：复合半导体薄膜生长的自动化，控制与建模

Modeling the Growth of Thin-Film Surfaces

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