Fabrication of Micro Structures using Thin Film Metallic Glass - Fabrication of Thin Film Metallic Glass and Micro-Forming using the Supercooled Liquid State -

首页> 外文期刊>精密工学会誌 >Fabrication of Micro Structures using Thin Film Metallic Glass - Fabrication of Thin Film Metallic Glass and Micro-Forming using the Supercooled Liquid State -

【24h】

Fabrication of Micro Structures using Thin Film Metallic Glass - Fabrication of Thin Film Metallic Glass and Micro-Forming using the Supercooled Liquid State -

机译：

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

This paper describes the fabrication process, internal stress relaxation and micro-forming of a thin film metallic glass (TFMG). Metallic glasses are kind of amorphous alloys having suitable characteristics for micro-mechanical systems as isotropic and homogeneous. Moreover metallic glasses softens in a certain temperature range called the supercooled liquid state, which makes metallic glasses easily formed into a three-dimensional shape. In this paper, Zr based TFMG was deposited by RF magnetron sputtering. The TFMG had the supercooled liquid state whose temperature width was 61K. Its physical properties such as density, corrosion resistance were measured as well. Micro-beams of TFMG were made by the rift off process. Although, the produced micro-beams buckled because of the internal stress by sputtering, this internal stress was relaxed by heating TFMG to the supercooled liquid state. Finally, TFMG micro beams were softened and micro-formed by heating it into the supercooled liquid state. The deformation mechanism was analyzed using a bimetal cantilever model and calculated results coincided with experimental ones.

著录项

来源
《精密工学会誌》 |2000年第6期|96-101|共6页
作者

展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种日语
中图分类机械制造工艺;
关键词
metallic glass; thin film; micro-forming; micro-beam; supercooled liquid; rift off process; internal stress relaxation; three-dimensional shape;

相似文献

外文文献
中文文献
专利

1. Fabrication and magnetoresistive effect of current perpendicular to plane devices using half-metallic Fe3O4 thin films on metallic films [J] . Takahashi H., Soeya S., Hayakawa J.Ito K.Kida A.Yamamoto C.Asano H.Matsui M. Journal of Applied Physics . 2003,第3期

机译：Fabrication and magnetoresistive effect of current perpendicular to plane devices using half-metallic Fe3O4 thin films on metallic films
2. Deformation Behavior of Free-Standing Pd-based Thin Film Metallic Glass for Micro Electro Mechanical Systems Applications [J] . Guang-Ping Zhang, Yongdong Liu, Bin Zhang Advanced Engineering Materials . 2005,第7期

机译：Deformation Behavior of Free-Standing Pd-based Thin Film Metallic Glass for Micro Electro Mechanical Systems Applications
3. Fabrication and electrical properties of sol-gel derived (BaSr)TiO{sub}3 thin films with metallic LaNiO{sub}3 electrode [J] . Di Wu, Aidong Li, Zhiguo LiuHuiqin LingChuan Zhen GeXiaoyong LiuHong WangMin WangPeng LuNaiben Ming Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films . 1998,第2期

机译：Fabrication and electrical properties of sol-gel derived (BaSr)TiO{sub}3 thin films with metallic LaNiO{sub}3 electrode
4. Evaluation of Temperature and Germanium Concentration Dependence of EXAFS Oscillations in Si-Rich Silicon Germanium Thin Films [C] . Kazutoshi Yoshioka, Ryo Yokogawa, Masato Koharada, Pacific Rim Meeting on Electrochemical and Solid-State Science . 2020

机译：Evaluation of Temperature and Germanium Concentration Dependence of EXAFS Oscillations in Si-Rich Silicon Germanium Thin Films
5. Characterization of the Solute Transport Properties of the Active Layers of Polyamide Thin Film Composite Membranes =聚酰胺薄膜复合膜活性层溶质输运性质的表征 [D] . Wang, Jingbo. 2018

机译：Characterization of the Solute Transport Properties of the Active Layers of Polyamide Thin Film Composite Membranes =聚酰胺薄膜复合膜活性层溶质输运性质的表征
6. Fabrication and testing of a doped lanthanum gallate electrolyte thin-film solid oxide fuel cell [O] . Yan JW, Lu ZG, Jiang Y, 2002

机译：Fabrication and testing of a doped lanthanum gallate electrolyte thin-film solid oxide fuel cell
7. Studies of ferroelectric heterostructure thin films and interfaces via in situ211 analytical techniques [R] . Auciello, O., Dhote, A., Gao, Y., 1999

机译：studies of ferroelectric heterostructure thin films and interfaces via in situ211 analytical techniques

Fabrication of Micro Structures using Thin Film Metallic Glass - Fabrication of Thin Film Metallic Glass and Micro-Forming using the Supercooled Liquid State -

摘要

著录项

相似文献

相关主题

期刊订阅