Determination of the average pore-size and total porosity in porous silicon layers by image processing of SEM micrographs

Elia Paz; Nativ-Roth Einat; Zeiri Yehuda; Porat Zeev

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Determination of the average pore-size and total porosity in porous silicon layers by image processing of SEM micrographs

机译：通过SEM图像处理确定多孔硅层中的平均孔径和总孔隙率

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This work describes a method for measuring the average pore size and the determination of the porosity of porous silicon (PSi) layers, which involves image processing of top-view SEM micrographs. The processing program can measure the total area of the pores and calculate its proportion to the total scanned area. In cases where the pores are longitudinal, uniform and non-branched, as evident from cross-section images, it is assumed that it represents also the ratio between the total volume of the pores to the volume of the entire layer, which defines the porosity of the layer. Our results are in good agreement with the literature values that were obtained by two physical methods. (C) 2016 Elsevier Inc. All rights reserved.

机译：这项工作描述了一种测量平均孔径和确定多孔硅（PSi）层孔隙率的方法，该方法涉及顶视图SEM显微照片的图像处理。该处理程序可以测量孔的总面积，并计算其与总扫描面积的比例。从横截面图像可以明显看出，在孔隙为纵向，均匀且无分支的情况下，假定孔隙也代表孔隙的总体积与整个层的体积之比，从而决定了孔隙率层。我们的结果与通过两种物理方法获得的文献值非常吻合。（C）2016 Elsevier Inc.保留所有权利。

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《Microporous and mesoporous materials: The offical journal of the International Zeolite Association》 |2016年第null期|共7页
作者
Elia Paz; Nativ-Roth Einat; Zeiri Yehuda; Porat Zeev;
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正文语种 eng
中图分类化学工业;
关键词
Porous silicon; Porosity; Image processing; Pore-size;

机译：多孔硅孔隙率图像处理孔径;

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1. 表面改性多孔钛植入体孔径和孔隙率对骨长入的影响 [J] . 郑景璞, 陈良建, 陈代远, 中国有色金属学报：英文版 . 2019,第012期
2. 表面改性多孔钛植入体孔径和孔隙率对骨长入的影响 [J] . 郑景璞, 陈良建, 陈代远, 中国有色金属学报（英文版） . 2019,第012期
3. Determination of the average pore-size and total porosity in porous silicon layers by image processing of SEM micrographs [J] . Elia Paz, Nativ-Roth Einat, Zeiri Yehuda, Microporous and mesoporous materials: The offical journal of the International Zeolite Association . 2016,第Null期

机译：通过SEM图像处理确定多孔硅层中的平均孔径和总孔隙率
4. Applying Digital Image Processing to SEM-EDX and BSE Images to Determine and Quantify Porosity and Salts with Depth in Porous Media [J] . Carolina Cardell, Rene E. Van Grieken Mikrochimica Acta: An International Journal for Physical and Chemical Methods of Analysis . 2002,第1a2期

机译：将数字图像处理应用于SEM-EDX和BSE图像，以确定和定量多孔介质中具有深度的孔隙率和盐分
5. A novel process for the preparation of thick porous silicon layers with very high porosity [J] . A. Feyh, F. Laermer, S. Kronmueller, Physica Status Solidi. A, Applied Research . 2005,第8期

机译：一种制备具有很高孔隙率的厚多孔硅层的新方法
6. DETERMINATION OF POROSITY CONTENT IN COMPOSITES BY MICROGRAPH IMAGE PROCESSING [C] . A. H. Kite, D. K. Hsu, D. J. Barnard Annual Rewiew of Progress in Quantitative Nondestructive Evaluation . 2008

机译：通过显微照片处理测定复合材料中的孔隙率含量
7. Elastic and structural properties of supported porous silicon layers. [D] . Andrews, Gordon Todd. 1999

机译：支撑的多孔硅层的弹性和结构特性。
8. Annihilating Pores in the Desired Layer of a Porous Silicon Bilayer with Different Porosities for Layer Transfer [O] . C.-C. Chiang, Benjamin T.-H. Lee -1

机译：消灭具有不同孔隙率的双层多孔硅双层膜的所需层中的孔
9. Porosity and roughness determination of porous silicon thin films by genetic algorithms [O] . C.F. Ramirez-Gutierrez, J.D. Castaño-Yepes, M.E. Rodriguez-Garcia 2018

机译：遗传算法多孔硅薄膜的孔隙率和粗糙度测定
10. Porosity Determinations in Buried and Surface Layers of Porous Silicon [R] . Guilinger, T. R. , Kelly, M. J. , Tsao, S. S. 1987

机译：多孔硅埋层和表层的孔隙率测定

Determination of the average pore-size and total porosity in porous silicon layers by image processing of SEM micrographs

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