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A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

机译：用于微机电系统（MEMS）器件静态和动态表征的电容和光学方法

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As the micro technology field expands, the need of simple and standardized procedures to precisely evaluate device functionality, realibility and quality of micro electro mechanical systems devices increases. In this paper the application of two empirical methods suitable for the static and the dynamic characterization of micrometersized structures is proposed. The first methodology is based on capacitance measurements and finds simple application in case of comb-finger actuated devices. The second one is based on the Doppler phenomenon combined with laser optical interferometry allowing the characterization of a wide range of structures. The methodologies are applied to a reliability test structure specifically designed at STMicroelectronics for studying the fatigue behaviour of the structural material involved in the fabrication of their commercial products. This case of study highlights how the techniques may be coupled to usual design approaches for completing and verifying the information given by theory and simulations; thus improving the entire development cycle.
机译：随着微技术领域的扩展，对精确评估设备功能，微机电系统设备的真实性和质量的简单标准化过程的需求不断增加。本文提出了两种适用于微米结构静态和动态表征的经验方法的应用。第一种方法基于电容测量，在梳指驱动的设备中找到简单的应用。第二种是基于多普勒现象，结合激光光学干涉术，可以表征各种结构。该方法应用于STMicroelectronics专门设计的可靠性测试结构，用于研究参与其商业产品制造的结构材料的疲劳行为。本研究案例强调了如何将这些技术与通常的设计方法相结合，以完成和验证理论和模拟给出的信息;从而改善了整个开发周期。

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