Simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric thickness ratio

Sunithamani S.; Lakshmi P.

首页> 外文期刊>Microsystem technologies >Simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric thickness ratio

【24h】

Simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric thickness ratio

机译：优化基板与压电厚度比的MEMS压电能量采集器性能的仿真研究

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Piezoelectric energy harvester produces electrical energy based on direct piezoelectric effect. Cantilevered structures with piezoelectric layers are used as MEMS piezoelectric energy harvester for more than one decade. This paper reports on simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric layer thickness ratio. Stainless steel and single crystal PMN32 are used as substrate and piezoelectric materials respectively. Four different structures are designed and the thickness ratio of substrate to piezoelectric layer is varied to study its effect on performance of MEMS piezoelectric energy harvester. The performance of MEMS piezoelectric energy harvester is simulated using the software COMSOL Multiphysics.

机译：压电能量收集器基于直接压电效应产生电能。具有压电层的悬臂结构被用作MEMS压电能量收集器已有十多年的历史。本文报道了优化的压电与压电层厚度比的MEMS压电能量采集器性能的模拟研究。不锈钢和单晶PMN32分别用作衬底和压电材料。设计了四种不同的结构，并改变了基板与压电层的厚度比，以研究其对MEMS压电能量采集器性能的影响。使用COMSOL Multiphysics软件模拟MEMS压电能量收集器的性能。

著录项

来源
《Microsystem technologies》 |2015年第4期|共6页
作者
Sunithamani S.; Lakshmi P.;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词

相似文献

外文文献
中文文献
专利

1. Simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric thickness ratio [J] . Sunithamani S., Lakshmi P. Microsystem technologies . 2015,第4期

机译：优化基板与压电厚度比的MEMS压电能量采集器性能的仿真研究
2. PZT length optimization of MEMS piezoelectric energy harvester with a non-traditional cross section: simulation study [J] . S. Sunithamani, P. Lakshmi, E. Eba Flora Microsystem technologies . 2014,第12期

机译：非传统截面的MEMS压电能量采集器的PZT长度优化：仿真研究
3. Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters [J] . Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh, Microsystem Technologies . 2012,第11期

机译：在硅衬底上制备铝掺杂的氧化锌压电薄膜，用于压电MEMS能量收集器
4. Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester [C] . Bapi Debnath, R. Kumar IEEE International Conference on Computing, Power and Communication Technologies . 2020

机译：基于MEMS压电压电振动能量采集器的新型U形弹簧的设计与仿真研究
5. MEMS Piezoelectric Vibrational Energy Harvesters and Circuits for IoT Applications =MEMS piézoélectriques pour la récupération d’énergie vibratoire et circuits pour l’internet des objets [D] . Alameh, Abdul-Hafiz. 2019

机译：MEMS压电振动能量收割机和电路用于IOT应用=互联网对象的振动能量回收和电路的压电MEMS
6. Data relating to mems piezoelectric micro power harvester physical parameter optimization for extremely low frequency and low vibration level applications [O] . Mohd H.S. Alrashdan 2020

机译：关于MEMS压电微功率HARVESTER物理参数优化的数据用于极低频率和低振动级应用
7. Simulation study of MEMS piezoelectric vibration energy harvester based on c-axis tilted AlN thin film for performance improvement [O] . Lingfeng Kong, Jinhui Zhang, Huiyuan Wang, 2016

机译：基于c轴倾斜alN薄膜的mEms压电振动能量收集器性能改进仿真研究

Simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric thickness ratio

摘要

著录项

相似文献

相关主题

期刊订阅