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首页> 外文期刊>Microsystem technologies >Fabrication and characterisation of bulk micromachined ZnO energy transducer with interdigitated electrodes
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Fabrication and characterisation of bulk micromachined ZnO energy transducer with interdigitated electrodes

机译：具有指状电极的块状微机械ZnO能量换能器的制备与表征

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摘要

The proposed research work deals with the design, fabrication and characterisation of a ZnO cantilever energy transducer on Si(c) without the use of SOI wafers, thereby, reducing the cost of fabrication. The energy transducer is operated in the longitudinal mode through the interdigitated electrodes. This is for the first time, we have attempted to fabricate a cantilever transducer with interdigitated electrodes on Si(c) in our lab. The design frequency has been chosen in the range of 700-1000 Hz for a typical tire pressure monitoring system application in mind. The experimentally obtained frequency is 876.25 Hz and d(33) was calculated as 3.9 pC/N from the measurements. The experimental results are further validated by simulation and the feasibility of its application as energy harvester is demonstrated. The fabrication process is being optimised to fabricate devices with higher piezoelectric coefficients.
机译：拟议的研究工作涉及在不使用SOI晶片的情况下在Si（c）上设计，制造和表征ZnO悬臂梁能量传感器的方法，从而降低了制造成本。能量转换器通过叉指电极以纵向模式运行。这是我们第一次尝试在我们的实验室中在Si（c）上制造带有叉指电极的悬臂换能器。考虑到典型的胎压监测系统应用，已将设计频率选择在700-1000 Hz的范围内。实验获得的频率为876.25 Hz，根据测量结果得出的d（33）为3.9 pC / N。通过仿真进一步验证了实验结果，并证明了其作为能量采集器的可行性。正在优化制造工艺以制造具有更高压电系数的器件。

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