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首页> 外文期刊>Microwave and optical technology letters >ADJUSTABLE FLUIDIC LENSES FOR CORRECTING PISTON/DEFOCUS/ASTIGMATISM ABERRATIONS INDUCED BY MEMS DEFORMABLE MIRRORS
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ADJUSTABLE FLUIDIC LENSES FOR CORRECTING PISTON/DEFOCUS/ASTIGMATISM ABERRATIONS INDUCED BY MEMS DEFORMABLE MIRRORS

机译：可调整的流体透镜，可纠正MEMS可变形镜引起的活塞/偏心/防抖异常

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摘要

An adjustable fluidic lens is typically utilizing curvature change and is promising to correct the aberrations such as piston, defocus, and astigmatism. In this article, capability of adjustable fluidic lenses to correct the induced wavefront aberrations is investigated systematically, with particular attention placed on interpretation of Zernike modes and exploration of the potentials of fluidic lenses. In addition, aberrations are expressed in Zernike polynomials and the first six modes commonly encountered in ophthalmology are carefully examined. Three different wavefront aberrations are intentionally induced by a commercial micro-electrical-mechanical systems (MEMS) deformable mirrors (DM) with 140 actuators. The optical properties of fluidic lenses corrections are characterized by Shack-Hartmann measurements. Experimental results show that piston mode (Z_1) can be significantly improved from 0.972 to -0.031μm using fluidic lenses by injecting DI water as little as 0.02μm (resultant meniscus curvature is 392.8 mm). Similar improvements can be found in defocus (Z_5)/ astigmatism (Z_6) and aberrations are reduced for both modes from -0.15μm/-0.48μm to 0.02μm/0.085μm, respectively. When injected volume of 0.1 ml (resultant meniscus curvature is 78.9 mm), we can experimentally deduce that aberrations of Z_3/Z_5 induced by MEMS DM at a magnitude of 0.486μm/-1.472μm, fluidic lenses can only marginally improved to -0.245μm/0.305μm.
机译：可调流体透镜通常利用曲率变化，并有望校正像差，例如活塞，散焦和像散。在本文中，系统地研究了可调节流体透镜校正所引起的波前像差的能力，并特别关注Zernike模式的解释和流体透镜潜力的探索。此外，像差以Zernike多项式表示，并仔细检查了眼科中常见的前六个模式。具有140个执行器的商用微机电系统（MEMS）可变形反射镜（DM）有意引起三种不同的波前像差。流体透镜矫正的光学特性通过Shack-Hartmann测量来表征。实验结果表明，通过注入低至0.02μm的去离子水（弯月面弯曲度为392.8 mm），使用流体透镜可以将活塞模式（Z_1）从0.972显着提高到-0.031μm。在散焦（Z_5）/像散（Z_6）中可以找到类似的改进，并且两种模式的像差分别从-0.15μm/-0.48μm减小到0.02μm/0.085μm。当注入量为0.1 ml（弯月面弯曲度为78.9 mm）时，我们可以通过实验推断出MEMS DM引起的Z_3 / Z_5像差为0.486μm/-1.472μm，流体透镜只能稍微改善到-0.245μm /0.305μm。

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