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首页> 外文期刊>Measurement Science & Technology >Development of a coordinate measuring machine (CMM) touch probe using a multi-axis force sensor
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Development of a coordinate measuring machine (CMM) touch probe using a multi-axis force sensor

机译：使用多轴力传感器开发坐标测量机（CMM）测头

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摘要

Traditional touch trigger probes are widely used on most commercial coordinate measuring machines (CMMs). However, the CMMs with these probes have a systematic error due to the shape of the probe tip and elastic deformation of the stylus resulting from contact pressure with the specimen. In this paper, a new touch probe with a three degrees-of-freedom force sensor is proposed. From relationships between an obtained contact force vector and the geometric shape of the probe, it is possible to calculate the coordinates of the exact probe-specimen contact points. An empirical model of the probe is applied to calculate the coordinates of the contact points and the amount of pretravel. With the proposed probing system, the measuring error induced by the indeterminateness of the probe-specimen contact point and the pretravel can be estimated and compensated for successfully.
机译：传统的触发式测头广泛用于大多数商用坐标测量机（CMM）。然而，由于探针尖端的形状以及由于与样品的接触压力而引起的测针的弹性变形，带有这些探针的三坐标测量机存在系统误差。本文提出了一种新型的具有三自由度力传感器的测头。根据获得的接触力矢量和探针的几何形状之间的关系，可以计算出精确的探针-样本接触点的坐标。应用探针的经验模型来计算接触点的坐标和预行程量。利用所提出的探测系统，可以成功地估计和补偿由探针-样品接触点和预行程不确定性引起的测量误差。

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