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首页> 外文期刊>Measurement Science & Technology >A highly sensitive multi-dimensional motion measurement system using a spherical reflector
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A highly sensitive multi-dimensional motion measurement system using a spherical reflector

机译：使用球面反射镜的高灵敏度多维运动测量系统

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摘要

A new measurement system is proposed that can detect three-degree-of-freedom (three-DOF) translational motions of an object with high sensitivity. Its measurement method is based on an optical lever technique using a spherical reflector. The spherical reflector is mounted on an object whose motion is to be measured. It reflects each laser beam, generated from two laser sources, in two different directions, depending on the motion of the object of interest. The reflected beam is then detected by two PSDs. Since each PSD is a two-dimensional sensor, the information on the 3D position of the spherical reflector can be acquired, thus enabling us to measure the three-DOF translational motions of the object. The relationship between the 3D position of the spherical reflector and the outputs of two PSDs is modelled through ray tracing. To verify the principle and effectiveness of the proposed method, a series of experiments were performed and the performance indices were evaluated, such as sensitivity, resolution, measurement error and crosstalk. In experiments, the resolution of each sensing direction is approximately 0.16 (mu)m and the measurement error and crosstalk between sensing channels are within +-0.1 (mu)m. The experimental results show that the proposed system can be an effective means of measuring three-DOF translational motions of arbitrary objects with high sensitivity.
机译：提出了一种新的测量系统，该系统可以高灵敏度地检测物体的三自由度（三自由度）平移运动。其测量方法基于使用球形反射镜的光杠杆技术。球形反射器安装在要测量其运动的物体上。它根据感兴趣对象的运动，沿两个不同方向反射从两个激光源生成的每个激光束。然后，通过两个PSD检测反射光束。由于每个PSD是二维传感器，因此可以获取有关球面反射器3D位置的信息，从而使我们能够测量物体的三自由度平移运动。球面反射器的3D位置与两个PSD的输出之间的关系通过射线跟踪进行建模。为了验证该方法的原理和有效性，进行了一系列实验，并评估了灵敏度，分辨率，测量误差和串扰等性能指标。在实验中，每个感测方向的分辨率约为0.16μm，并且感测通道之间的测量误差和串扰均在+ -0.1μm之内。实验结果表明，该系统可以有效地测量任意物体的三自由度平移运动。

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