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Selective surface functionalization of silicon nanowires via nanoscale Joule heating

机译:硅纳米线通过纳米焦耳加热的选择性表面功能化

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摘要

In this letter, we report a novel approach to selectively functionalize the surface of silicon nanowires located on silicon-based substrates. This method is based upon highly localized nanoscale Joule heating along silicon nanowires under an applied electrical bias. Numerical simulation shows that a high-temperature (>800 K) with a large thermal gradient can be achieved by applying an appropriate electrical bias across silicon nanowires. This localized heating effect can be utilized to selectively ablate a protective polymer layer from a region of the chosen silicon nanowire. The exposed surface, with proper postprocessing, becomes available for surface functionalization with chemical linker molecules, such as 3-mercaptopropyltrimethoxysilanes, while the surrounding area is still protected by the chemically inert polymer layer. This approach is successfully demonstrated on silicon nanowire arrays fabricated on SOI wafers and visualized by selective attachment of gold nanoparticles.
机译:在这封信中,我们报告了一种新颖的方法,可以选择性地功能化位于硅基衬底上的硅纳米线的表面。该方法基于在施加的电偏压下沿着硅纳米线的高度局部化的纳米焦耳加热。数值模拟表明,可以通过在硅纳米线上施加适当的电偏压来实现具有大热梯度的高温(> 800 K)。可以利用这种局部加热效应来从选定的硅纳米线的区域选择性地烧蚀保护性聚合物层。通过适当的后处理,暴露的表面可用于通过化学连接分子(例如3-巯基丙基三甲氧基硅烷)进行表面功能化,而周围区域仍受化学惰性聚合物层的保护。该方法已在SOI晶圆上制造的硅纳米线阵列上成功展示,并通过选择性附着金纳米颗粒而可视化。

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