Edge transfer lithography using alkanethiol inks

Sharpe RBA; Titulaer BJF; Peeters E; Burdinski D; Huskens J; Zandvliet HJW; Reinhoudt DN; Poelsema B

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Edge transfer lithography using alkanethiol inks

机译：使用链烷硫醇油墨的边缘转移光刻

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Edge lithographic patterning techniques are based on the utilization of the edges of micrometer-sized template features for the reproduction of submicrometer structures. Edge transfer lithography (ETL) permits local surface modification in a single step by depositing self-assembled monolayers onto a metal substrate selectively along the feature edges of an elastomeric stamp. In this report two stamp designs are described that now allow for the use of alkanethiol inks in ETL and their use as etch resists to reproduce submicrometer structures in gold. Anisotropically modified stamps are shown to combine the potential for very high-resolution patterning with the versatility and simplicity of microcontact printing.

机译：边缘光刻构图技术基于对微米级模板特征边缘的利用，以再现亚微米结构。边缘转移光刻（ETL）通过将自组装单分子层选择性地沿着弹性体印模的特征边缘沉积到金属基板上，从而在单个步骤中进行局部表面修饰。在本报告中，描述了两种印章设计，现在可以在ETL中使用链烷硫醇油墨，并可以将其用作抗蚀剂以复制金的亚微米结构。各向异性改性的印模显示出结合了非常高分辨率图案的潜力以及微接触印刷的多功能性和简便性。

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《Nano letters》 |2006年第6期|共5页
作者
Sharpe RBA; Titulaer BJF; Peeters E; Burdinski D; Huskens J; Zandvliet HJW; Reinhoudt DN; Poelsema B;
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正文语种 eng
中图分类特种结构材料;
关键词
ELASTOMERIC PHASE MASK; SOFT LITHOGRAPHY; SPREADING LITHOGRAPHY; STAMP DEFORMATION; ION-BOMBARDMENT; HIGH-RESOLUTION; NEAR-FIELD; GOLD; FABRICATION; DEPOSITION;

机译：弹性相膜;软光刻;扩展光刻;压头变形;离子轰击;高分辨;近场;金;制造;沉积;

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1. Edge transfer lithography using alkanethiol inks [J] . Sharpe RBA, Titulaer BJF, Peeters E, Nano letters . 2006,第6期

机译：使用链烷硫醇油墨的边缘转移光刻
2. Metallic Antireflection Structures Made from Silver Ink by a Liquid Transfer Imprint Lithography Technique [J] . Ichiro Mano, Tomoya Uchida, Jun Taniguchi Journal of Photopolymer Science and Technology . 2017,第5期

机译：液体转移压印光刻技术由银墨制成的金属减反射结构
3. A new understanding on the mechanism of fountain solution in the prevention of ink transfer to the non-image area in conventional offset lithography [J] . Wei Shen, Brenda Hutton, Fuping Liu Journal of Adhesion Science and Technology: The International Journal of Theoredtical and Basic Aspects of Adhesion Science and Its Applications in All Areas of Technology . 2004,第15a16期

机译：对润版液在传统胶版印刷术中防止油墨转移到非图像区域的机理的新认识
4. Micro- and Nanoscale Patterning of Alkanethiol Monolayers on Gold Using Edge-Spreading Lithography: Principles and Applications [C] . Matthias Geissler PMSE Symposia . 2006

机译：使用边缘扩展光刻的金属烷醇单层的微型和纳米级图案化：原理和应用
5. Polymer-based capacitors, junction field-effect transistors, and a follower circuit by lithography, self-assembly, and ink-jet printing techniques. [D] . Liu, Yuxin. 2003

机译：通过光刻，自组装和喷墨打印技术的基于聚合物的电容器，结型场效应晶体管和跟随器电路。
6. Automated scanning probe lithography with n-alkanethiol self assembled monolayers on Au(111): Application for teaching undergraduate laboratories [O] . Treva T. Brown, Zorabel M. LeJeune, Kai Liu, -1

机译：用正硫醇自组装单层自动扫描探针光刻在au（111）：用于教导本科实验室应用
7. Micro- and Nanoscale Patterning of Alkanethiol Monolayers on Gold using Edge-Spreading Lithography [O] . Geissler Matthias, Cameron Neil S., Veres Teodor, 2006

机译：使用边缘扩展光刻技术在金上的烷硫醇单分子膜的微尺度和纳米尺度图案
8. Scanning Probe Lithography. 1. Scanning Tunneling Microscope-Induced Lithography of Self-Assembled n-Alkanethiol Monolayer Resists. [R] . Ross, C. B., Sun, L., Crooks, R. M. 1993

机译：扫描探针光刻。 1.扫描隧道显微镜诱导的自组装正烷硫醇单层抗蚀剂的光刻。

Edge transfer lithography using alkanethiol inks

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