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Simulation of atomic force microscopy operation via three-dimensional finite element modelling

机译：通过三维有限元建模模拟原子力显微镜操作

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Numerical modelling of atomic force microscopy cantilever designs and experiments is presented with the aim of exploring friction mechanisms at the microscale. As a starting point for this work, comparisons between finite element (FE) models and previously reported mathematical models for stiffness calibration of cantilevers (beam and V-shaped) are presented and discrepancies highlighted. A colloid probe (comprising a plain cantilever on which a particle is adhered) model was developed, and its normal and shear interaction were investigated, exploring the response of the probe accounting for inevitable imperfections in its manufacture. The material properties of the cantilever had significant impact on both the normal response and the lateral response. The sensitivity of the mechanical response in both directions was explored and it was found to be higher in terms of normal rather than lateral sensitivity. In lateral measurements, generic response stages were identified, comprising a first stage of twisting, followed by lateral bending, and then slipping. This was present in the two cantilever types explored (beam and V-shaped). Additionally, a model was designed to explore the dynamic sensitivity by comparing the simulation of a hysteresis loop with a previously reported experiment, and the results show good agreement in the response pattern. The ability to simulate the scan over an inclined surface representing the flank of an asperity was also demonstrated.
机译：提出了原子力显微镜悬臂设计和实验的数值模型，旨在探索微观尺度上的摩擦机理。作为这项工作的起点，介绍了有限元（FE）模型与先前报告的悬臂（梁和V形）刚度校准数学模型之间的比较，并突出了差异。开发了一种胶体探针（包括粘附有颗粒的普通悬臂）模型，并研究了其正常和剪切相互作用，探讨了探针响应的原因，解释了其制造过程中不可避免的缺陷。悬臂的材料特性对正常响应和横向响应都有重大影响。探索了在两个方向上的机械响应的灵敏度，并且发现其在法向灵敏度上比横向灵敏度更高。在横向测量中，确定了通用响应阶段，包括扭转的第一阶段，然后是横向弯曲，然后是打滑。存在于所研究的两种悬臂类型中（梁和V形）。此外，设计了一个模型，通过将磁滞回线的仿真结果与先前报道的实验进行比较来探索动态灵敏度，结果表明响应模式具有很好的一致性。还展示了在代表粗糙面的倾斜表面上进行模拟扫描的能力。

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