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Selective-area growth of vertically aligned GaAs and GaAs/AlGaAs core-shell nanowires on Si(111) substrate

机译:Si(111)衬底上垂直排列的GaAs和GaAs / AlGaAs核壳纳米线的选择性区域生长

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We report on selective-area growth of vertically aligned GaAs nanowires on Si(111) substrate. Modification of the initial Si(111) surface by pretreatment under an AsH_3 atmosphere and low-temperature growth of GaAs were important for controlling the growth orientations of the GaAs nanowire on the Si(111) surface. We also found that the size of openings strongly affected the growth morphology of GaAs nanowires on Si(111). Small diameter openings reduced the antiphase defects and improved the optical properties in the GaAs nanowires. Moreover, we realized coherent growth without misfit dislocation at the GaAs/Si interface. Finally, we demonstrated fabrication of a GaAs/AlGaAs core-shell nanowire array on a Si surface and revealed that the luminescence intensity was markedly enhanced by passivation effects. These results are promising for future III-V nanowire-based optoelectronic integration on Si platforms.
机译:我们报告在Si(111)衬底上垂直排列的GaAs纳米线的选择性区域生长。通过在AsH_3气氛下进行预处理对初始Si(111)表面进行改性以及GaAs的低温生长对于控制Ga(Si)111上的GaAs纳米线的生长方向非常重要。我们还发现,开口的大小强烈影响了Si(111)上GaAs纳米线的生长形态。小直径的开口减少了GaAs纳米线中的反相缺陷并改善了光学性能。此外,我们实现了一致的生长,而在GaAs / Si界面上没有错位错位。最后,我们展示了在Si表面上制备GaAs / AlGaAs核壳纳米线阵列的过程,并揭示了钝化效应显着增强了发光强度。这些结果对于未来在Si平台上基于III-V纳米线的光电集成很有希望。

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