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Enhanced electroluminescence from nanoscale silicon p(+)-n junctions made with an anodic aluminum oxide pattern

机译:阳极氧化铝图案制成的纳米级硅p(+)-n结增强的电致发光

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摘要

An enhancement of the electroluminescence (EL) from nanoscale silicon p(+)-n junctions made with an anodic aluminum oxide (AAO) pattern was demonstrated. The nanoporous AAO pattern with a pore density of 1.4 x 10(10) cm(-2) and a pore diameter of 50 +/- 10 nm was fabricated by the two-step anodic oxidation method on a n-type silicon wafer. The nanoscale AAO patterned Si p(+)-n junctions achieved an EL enhancement factor up to about 5 compared to the unpatterned Si p(+)-n junctions. The enhancement may originate from a reduction of nonradiative recombination due to partial passivation of the Si surface by the AAO pattern and improvement of the light extraction due to surface nanotextures.
机译:证明了用阳极氧化铝(AAO)图案制成的纳米级硅p(+)-n结增强了电致发光(EL)。通过两步阳极氧化法在n型硅片上制备了具有1.4 x 10(10)cm(-2)的孔密度和50 +/- 10 nm的孔径的纳米多孔AAO图案。与未图案化的Si p(+)-n结相比,纳米级AAO图案化的Si p(+)-n结达到了约5的EL增强因子。增强可以源自由于通过AAO图案对Si表面的部分钝化而导致的非辐射复合的减少以及由于表面纳米纹理而导致的光提取的改善。

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