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Removal of AFM moire measurement errors due to non-linear scan and creep of probe

机译：消除了由于非线性扫描和探头蠕变引起的AFM莫尔条纹测量误差

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摘要

In this paper, we propose a technique to remove the fringe distortion and measurement error of AFM moire due to the non-linear scan and creep of the probe. In this technique, the scanned AFM image of a standard holography grating and a virtual grating were used to generate the AFM moire fringe pattern. Two sets of moire fringe patterns, i.e. the initial fringe pattern prior to loading and the subsequent fringe pattern after uniform 'loading', were achieved in this way. Fringe pattern distortion can be found due to the non-linear scan and creep of the AFM probe. Then, phase shifting is precisely realized to AFM moire fringe patterns with the aid of a virtual grating and a logical moire technique. Wrapped and unwrapped phase maps of the two fringe patterns were calculated respectively. Finally, the unwrapped phase map of the initial fringe pattern was subtracted from that of the fringe pattern after loading and a new fringe pattern free from distortion was reconstructed; this corresponded to the uniform 'loading'. In this way, the fringe distortion and measurement errors due to the non-linear scan and creep of the AFM probe were removed.
机译：在本文中，我们提出了一种消除由于探头的非线性扫描和蠕变引起的AFM莫尔条纹的畸变和测量误差的技术。在该技术中，使用标准全息光栅和虚拟光栅的扫描AFM图像生成AFM莫尔条纹图案。以这种方式获得了两组莫尔条纹图案，即在加载之前的初始条纹图案和在均匀“加载”之后的随后的条纹图案。由于AFM探头的非线性扫描和蠕变，可以发现条纹图案失真。然后，借助虚拟光栅和逻辑莫尔条纹技术，可以精确地实现AFM莫尔条纹图案的相移。分别计算了两个条纹图案的包裹和未包裹的相位图。最后，从加载后的条纹图案的相位图中减去初始条纹图案的展开相位图，并重建了没有失真的新条纹图案;这对应于统一的“加载”。通过这种方式，消除了由于AFM探头的非线性扫描和蠕变引起的条纹失真和测量误差。

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