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Electrochemical characterization of parylene-embedded carbon nanotube nanoelectrode arrays

机译：聚对二甲苯包埋的碳纳米管纳米电极阵列的电化学表征

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摘要

A novel parylene-embedded carbon nanotube nanoelectrode array is presented for use as an electrochemical detector working electrode material. The fabrication process is compatible with standard microfluidic and other MEMS processing without requiring chemical mechanical polishing, Electrochemical studies of the nanoelectrodes showed that they perform comparably to platinum. Electrochemical pretreatment for short periods of time was found to further improve performance as measured by cathodic and anodic peak separation of K3Fe(CN)(6). A lower detection limit below 0.1 mu M was measured and with further fabrication improvements detection limits between 100 pM and 10 nM are possible. This makes the nanoelectrode arrays particularly suitable for trace electrochemical analysis.
机译：提出了一种新型的聚对二甲苯嵌入式碳纳米管纳米电极阵列，用作电化学检测器工作电极材料。该制造工艺与标准微流体和其他MEMS工艺兼容，而无需化学机械抛光。对纳米电极的电化学研究表明，它们的性能与铂相当。通过K3Fe（CN）（6）的阴极和阳极峰分离测量，发现短时间的电化学预处理可以进一步提高性能。测得的检测下限低于0.1μM，并且随着制造工艺的进一步改进，检测下限可能在100 pM至10 nM之间。这使得纳米电极阵列特别适合于痕量电化学分析。

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