Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating

W-T Wu; K-H CHEN; C-M HSU

首页> 外文期刊>Nanotechnology >Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating

【24h】

Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating

机译：使用电子回旋共振化学气相沉积在不加热的情况下在钴催化剂膜上生长碳纳米管

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

This paper demonstrates that carbon nanotubes (CNTs) can be synthesized on a cobalt coated silicon substrate using electron cyclotron chemical vapour deposition and without intentionally heating the substrate. With the mixed gases of C_3H_8/N_2, CNTs with a multi-walled structure and a diameter up to 70 nm have been observed. Results show that the diameter of the CNTs increases with the thickness of the cobalt catalyst film and the amount of nitrogen incorporated in the CNT films considerably influences the structures of the CNTs. Vertically aligned CNTs can be fabricated with a microwave power as low as 300 W and the flow rate ratio of C_3H_8/N_2 = 20/20 sccm. The CNTs exhibit a turn-on field of 0.2 V mu m~(-1) determined at the emission current density of 10 mu A cm~(-2).

机译：本文证明，可以使用电子回旋加速器化学气相沉积技术在钴涂覆的硅基板上合成碳纳米管（CNT），而无需故意加热基板。利用C_3H_8 / N_2的混合气体，观察到具有多壁结构且直径最大为70nm的CNT。结果表明，CNT的直径随钴催化剂膜的厚度而增加，并且结合在CNT膜中的氮的量极大地影响了CNT的结构。可以使用低至300 W的微波功率和C_3H_8 / N_2 = 20/20 sccm的流率来制造垂直排列的CNT。在发射电流密度为10μAcm〜（-2）时，CNT的导通场为0.2 Vμm〜（-1）。

著录项

来源
《Nanotechnology》 |2006年第18期|共6页
作者
W-T Wu; K-H CHEN; C-M HSU;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词

相似文献

外文文献
中文文献
专利

1. Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating [J] . W-T Wu, K-H CHEN, C-M HSU Nanotechnology . 2006,第18期

机译：使用电子回旋共振化学气相沉积在不加热的情况下在钴催化剂膜上生长碳纳米管
2. Itnertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition [J] . Yang Wubao, Wang Jiuli, Zhang Guling, Chinese physics . 2003,第11期

机译：电子回旋共振微波等离子增强化学气相沉积制备的原纤维状菱形碳膜
3. Itnertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition [J] . Yang Wubao, Wang Jiuli, Zhang Guling, Chinese physics . 2003,第11期

机译：电子回旋共振微波等离子体增强化学气相沉积法制备的双捻原纤状类金刚石碳膜
4. Photoluminescence Evolution of Silicon Carbonitride Thin Films Grown by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition [C] . Z. Khatami, P.R.J. Wilson, J. Wojcik, Society of Vacuum Coaters annual technical conference . 2014

机译：电子回旋共振等离子体增强化学气相沉积法生长碳氮化硅薄膜的光致发光演化
5. Electron cyclotron resonance chemical vapor deposition of precious metal-doped diamond-like carbon films. [D] . Ueno, Mayumi. 2000

机译：电子回旋共振化学气相沉积的贵金属掺杂类金刚石碳膜。
6. Revisiting behaviour of monometallic catalysts in chemical vapour deposition synthesis of single-walled carbon nanotubes [O] . Rong Xiang, Shigeo Maruyama 2018

机译：单金属催化剂在单壁碳纳米管化学气相沉积合成中的复习行为
7. Controlled growth of vertically aligned carbon nanotubes from palm oil precursor using thermal chemical vapour deposition method and its field electron emission properties / Suriani Abu Bakar [O] . Abu Bakar Suriani 2012

机译：使用热化学气相沉积法控制棕榈油前体中垂直排列的碳纳米管的生长及其场电子发射特性/ Suriani Abu Bakar

Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating

摘要

著录项

相似文献

相关主题

期刊订阅