Temperature effect on the substrate selectivity of carbon nanotube growth in floating chemical vapor deposition

Xiang R; Luo GH; Yang Z; Zhang Q; Qian WZ; Wei F

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Temperature effect on the substrate selectivity of carbon nanotube growth in floating chemical vapor deposition

机译：温度对浮动化学气相沉积中碳纳米管生长的基底选择性的影响

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An easy approach to control the carbon nanotube ( CNT) array selectivity on Si/ SiO2 in the floating chemical vapor deposition ( CVD) method by adjusting the operation temperature is demonstrated. Aligned CNTs can be obtained directly on Si using a standard procedure at a relatively low temperature. After analyzing the temperature influence on different substrates, an attempt to grow an ultra- long CNT forest at the optimized temperature and without any feedstock diffusion limitation is discussed.

机译：演示了一种通过调节操作温度来控制在浮动化学气相沉积（CVD）方法中控制Si / SiO2上的碳纳米管（CNT）阵列选择性的简便方法。可以在相对较低的温度下使用标准程序直接在Si上获得取向的CNT。在分析了温度对不同基材的影响后，讨论了在最佳温度下生长超长CNT林且没有任何原料扩散限制的尝试。

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《Nanotechnology》 |2007年第41期|共4页
作者
Xiang R; Luo GH; Yang Z; Zhang Q; Qian WZ; Wei F;
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正文语种 eng
中图分类一般工业技术;
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SILICON; ARRAYS; SITE;

机译：硅;阵列;站点;

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1. Temperature effect on the substrate selectivity of carbon nanotube growth in floating chemical vapor deposition [J] . Xiang R, Luo GH, Yang Z, Nanotechnology . 2007,第41期

机译：温度对浮动化学气相沉积中碳纳米管生长的基底选择性的影响
2. Selective growth of boron nitride nanotubes by plasma-enhanced chemical vapor deposition at low substrate temperature [J] . Guo L, Singh RN Nanotechnology . 2008,第6期

机译：在低衬底温度下通过等离子体增强化学气相沉积选择性生长氮化硼纳米管
3. Study on effects of substrate temperature on growth and structure of alignment carbon nanotubes in plasma-enhanced hot filament chemical vapor deposition system [J] . Chun Dang, Tingzhi Wang Applied Surface Science . 2006,第2期

机译：等离子体增强热丝化学气相沉积系统中衬底温度对取向碳纳米管生长和结构影响的研究
4. Low Temperature Growth of Carbon Nanotubes on Glass Substrate through the Thermal Chemical Vapor Deposition Method Using a Binary Catalyst System [C] . Min-Lian Kuo, Tsung-Yen Tsai, Nyan-Hwa Tai, International Display Manufacturing Conference amp; FPD Expo 2007(IDMC'07); 20070703-06; Taipei(CT) . 2007

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5. Carbon nanotube growth on tool steel substrates by thermal chemical vapor deposition (CVD) [D] . Nasuf, Gulfem Ipek 2008

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6. Continuous Synthesis of Double-Walled Carbon Nanotubes with Water-Assisted Floating Catalyst Chemical Vapor Deposition [O] . Liyu Dong, Jin Gyu Park, Branden E. Leonhardt, 2020

机译：水助浮催化剂化学气相沉积法连续合成双壁碳纳米管
7. Towards type-selective carbon nanotube growth at low substrate temperature via photo-thermal chemical vapour deposition [O] . Chen, J-S, Stolojan, V, Silva, SRP 2015

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8. Comparative Study of Three Different Chemical Vapor Deposition (CVD) Techniques of Carbon Nanotube Growth on Diamond Films. [R] . B. Tsao B. T. Quinton C. V. Varanasi J. Burke P. N. Barnes 2013

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Temperature effect on the substrate selectivity of carbon nanotube growth in floating chemical vapor deposition

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