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首页> 外文期刊>Nanotechnology >The measurement of attogram mass accumulation on nanostructures during e-beam scanning, using carbon nanopillars in resonant mode
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The measurement of attogram mass accumulation on nanostructures during e-beam scanning, using carbon nanopillars in resonant mode

机译：使用共振模式下的碳纳米柱，在电子束扫描过程中测量纳米结构上的原子堆积质量

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摘要

We present a `universal' phenomenon of mass accumulation and its sensing on nanostructures due to electron beam cracking of residual gas molecules during electron beam scanning. Though the extent of this phenomenon is limited to a very small increment in mass or thickness, it has significant implications for both the scientific and technological aspects of almost all processes in the nanodomain. Mass accumulation in every frame scan (or per second) is of the order of a few attograms and the thickness of deposition is of the order of picometre (fraction of a monolayer) only. Direct measurement of a mass or thickness of this order is difficult. Nanopillars having a high resonance `Q-factor' have been successfully exploited for such high precision measurements. The mass accumulation rate has been characterized with respect to (i) electron energy and beam current, (ii) environment within the chamber (presence or absence of a precursor gas) and (iii) partial exposure of the nanopillars to the e-beam.
机译：由于电子束扫描过程中残留气体分子的电子束破裂，我们提出了质量积累及其对纳米结构的感知的“普遍”现象。尽管这种现象的程度仅限于质量或厚度的很小增加，但它对纳米域几乎所有过程的科学和技术方面都具有重大意义。每次帧扫描（或每秒）中的质量积累约为几个attograms，沉积厚度仅为皮米级（单层分数）。直接测量该数量级的质量或厚度是困难的。具有高共振“ Q因子”的纳米柱已成功地用于此类高精度测量。质量累积速率已针对（i）电子能量和电子束电流，（ii）室内环境（存在或不存在前体气体）和（iii）纳米柱部分暴露于电子束进行了表征。

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