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首页> 外文期刊>Nanotechnology >Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement
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Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement

机译：噪声测量中涂层微悬臂中粘性和粘弹性耗散的频率依赖性

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摘要

We measure the mechanical thermal noise of soft silicon atomic force microscope cantilevers. Using an interferometric setup, we obtain a resolution down to 10-14 mHz-1/2 on a wide spectral range (3–105 Hz). The low frequency behavior depends dramatically on the presence of a reflective coating: almost flat spectra for uncoated cantilevers versus a 1/ f like trend for coated ones. The addition of a viscoelastic term in models of the mechanical system can account for this observation. Use of Kramers–Kronig relations validate this approach with a complete determination of the response of the cantilever: a power law with a small coefficient is found for the frequency dependence of viscoelasticity due to the coating, whereas the viscous damping due to the surrounding atmosphere is accurately described by the Sader model.
机译：我们测量软硅原子力显微镜悬臂的机械热噪声。使用干涉仪设置，我们可以在很宽的频谱范围（3–105 Hz）上获得低至10-14 mHz-1 / 2的分辨率。低频行为很大程度上取决于反射涂层的存在：未镀膜悬臂的光谱几乎是平坦的，而镀膜悬臂的趋势是1 / f。在机械系统模型中添加粘弹性项可以解释这一现象。使用Kramers-Kronig关系式可以完全确定悬臂的响应，从而验证了该方法的有效性：发现了由于涂层引起的粘弹性的频率依赖性，其系数较小的幂定律，而周围环境的粘滞阻尼为Sader模型可以准确描述。

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