Fabrication of self-aligned side gates to carbon nanotubes

L A W Robinson; S-B Lee; K B K Teo

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Fabrication of self-aligned side gates to carbon nanotubes

机译：碳纳米管自对准侧门的制造

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We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90 percent.

机译：我们已经制造了自对准，侧面门控的悬浮多壁碳纳米管（MWCNT），纳米管与栅极的间距小于10 nm。蒸发的金属在悬浮的MWCNT上形成一个岛，该岛和纳米管充当屏蔽衬底的掩模，然后提起并去除金属岛，留下一组自对准的侧门。研究了Al，Cr，Au和Ti，使用Cr可获得最佳结果，产率超过90％。

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《Nanotechnology》 |2003年第2期|共4页
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L A W Robinson; S-B Lee; K B K Teo;
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Fabrication of self-aligned side gates to carbon nanotubes

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