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Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films

机译:圆锥形钨印章,用于在阳极氧化铝膜中复制孔阵列

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摘要

A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65 MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array.
机译:通过应用一种新颖的程序(包括两步阳极氧化,然后依次进行阳极氧化和扩孔以形成名义上的漏斗孔)生成了钨母模。通过溅射涂覆将这些圆锥形孔填充钨,以制造母模。在65 MPa的压力下,母模成功地在经过退火和电抛光的铝表面上压纹。然后在用于产生原始孔阵列的条件下,将压纹表面用于控制通过阳极氧化产生的孔的位置。

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