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Controlled chattering-a new 'cutting-edge' technology for nanofabrication

机译:受控颤振-一种用于纳米加工的新“尖端”技术

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摘要

Chatters are unwanted random defects on surfaces often generated in cutting samples via microtome for micrographic analysis. In this work, we demonstrate that chatters can actually be controlled for fabrication of uniform periodic wavy patterns on polymethylmethacrylate surfaces. This control in chattering is achieved based on an oscillation cutting mechanism. Pattern sizes ranging from 30 nm to a few micrometers are obtained by fine-tuning cutting speed and oscillating frequency. This simple one-step non-lithographic 'cutting-edge' technology is simple and robust, with no chemical reactions and by-products involved and ease in scaling up for long-range and large-areas patterns.
机译:颤动是通常在通过显微切片机进行显微分析的切削样品中产生的表面上不需要的随机缺陷。在这项工作中,我们证明了颤振实际上可以得到控制,以在聚甲基丙烯酸甲酯表面上制造均匀的周期性波形图案。颤动的控制是基于振动切断机构来实现的。通过对切割速度和振荡频率进行微调,可以获得尺寸范围从30 nm到几微米的图案。这种简单的一步式非光刻“尖端”技术既简单又强大,不涉及任何化学反应和副产物,并且易于按比例放大以适应大范围和大面积图案。

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