Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography

Bretagnol F; Ceriotti L; Valsesia A; Sasaki T; Ceccone G; Gilliland D; Colpo P; Rossi F

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Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography

机译：结合等离子体工艺和电子束光刻技术制造功能性纳米图案表面

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This work presents a method for the fabrication of well defined chemically active nano-patterned surfaces. Electron-beam lithography has been combined with plasma-based processes in order to create sub-micron carboxylic functional areas over a non-bio-adhesive matrix. Characterization of the patterned surface by several surface analysis techniques reveals that this patterning technique is compatible with the plasma polymerization process in order to fabricate chemically active features with lateral size down to 300 nm. Moreover, experiments with a model protein ( bovine serum albumin) on the patterned surfaces show preferential adhesion on the active region indicating the ability of this method for the design of biosensing platforms.

机译：这项工作提出了一种用于制造定义明确的化学活性纳米图案表面的方法。电子束光刻技术已与基于等离子体的工艺相结合，以便在非生物粘附基质上形成亚微米级的羧基功能区。通过几种表面分析技术表征的图案化表面表明，该图案化技术与等离子体聚合工艺兼容，以便制造横向尺寸低至300 nm的化学活性特征。此外，在图案化表面上使用模型蛋白（牛血清白蛋白）进行的实验表明，在活性区域上存在优先粘附，表明该方法具有设计生物传感平台的能力。

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来源
《Nanotechnology》 |2007年第13期|共5页
作者
Bretagnol F; Ceriotti L; Valsesia A; Sasaki T; Ceccone G; Gilliland D; Colpo P; Rossi F;
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正文语种 eng
中图分类一般工业技术;
关键词
SELF-ASSEMBLED MONOLAYERS; BIOSENSING DEVICES; IMMOBILIZATION; POLYMERIZATION; INTERFACES; CHEMISTRY; ARRAYS; CELLS;

机译：自组装单层膜;生物传感装置;固定化;聚合;界面;化学;阵列;细胞;

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1. Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography [J] . Frederic Bretagnol, Laura Ceriotti, Andrea Valsesia Nanotechnology . 2007,第13期

机译：结合等离子体工艺和电子束光刻技术制造功能性纳米图案表面
2. Deterministic fabrication of circular Bragg gratings coupled to single quantum emitters via the combination of in-situ optical lithography and electron-beam lithography [J] . Kolatschek S., Hepp S., Sartison M., Journal of Applied Physics . 2019,第4期

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3. Directed Fabrication of Radially Stacked Multifunctional Oxide Heterostructures Using Soft Electron-Beam Lithography [J] . Zixiao Pan, Suresh K. Donthu, Nianqiang Wu, Small . 2006,第2期

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4. Electron-Beam Lithography Fabrication Process Development for a Mid-IR Plasmonic Metasurface with Fine Features [C] . M. Semple, A. K. Iyer International Congress on Artificial Materials for Novel Wave Phenomena . 2020

机译：电子束光刻制造工艺开发用于中红外等离子体元曲面的细节
5. Thin Polymer Films: I. Fabrication and Functionalization of Surfaces Coated with Azlactone-Containing Polymer Multilayers II. Surface-Mediated Release of Small-Molecule and Peptide-Based Modulators of Bacterial Communication [D] . Broderick, Adam H. 2012

机译：聚合物薄膜：I.涂有含内酯的聚合物多层涂层的表面的制造和功能化II。细菌介导的小分子和基于肽的调节剂的表面介导释放
6. A general lithography-free method of microscaleanoscale fabrication and patterning on Si and Ge surfaces [O] . Huatao Wang, Tom Wu 2012

机译：在Si和Ge表面上进行微尺度/纳米尺度制造和构图的通用免光刻方法
7. Modification of Polymer Surfaces and the Fabrication of Submicron‐scale Functionalized Structures by Deep‐ultraviolet and Electron‐beam Lithography [O] . Wybourne M. N. 2014

机译：深紫外和电子束光刻技术对聚合物表面的改性和亚微米级功能化结构的制造

Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography

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