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Carbon nanotube field-effect transistor with a carbon nanotube gate electrode

机译:具有碳纳米管栅电极的碳纳米管场效应晶体管

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摘要

An ultimate scaling in the gate width in a carbon nanotube field-effect transistor (CNTFET) is demonstrated with a gate electrode which is formed by another CNT (width of approx 3 nm) with conventional nanofabrication followed by manipulations with an atomic force microscope (AFM). The transport characteristics of the CNTFET with the CNT gate show marked improvements in device performance compared to one with the global back gate. This also shows that the AFM-based manipulations can help in fabricating prototypes of novel nanoelectronic devices based on CNTs.
机译:碳纳米管场效应晶体管(CNTFET)的栅极宽度的最终缩放比例是通过栅电极演示的,该栅电极由另一种CNT(宽度约为3 nm)通过常规纳米加工形成,然后通过原子力显微镜(AFM)进行操作)。与具有整体背栅的CNTFET相比,具有CNT栅的CNTFET的传输特性显示出器件性能的显着改善。这也表明基于AFM的操作可以帮助制造基于CNT的新型纳米电子器件的原型。

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