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Portable microsensors based on individual SnO2 nanowires

机译：基于单个SnO2纳米线的便携式微传感器

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Individual SnO2 nanowires were integrated in suspended micromembrane-based bottom-up devices. Electrical contacts between the nanowires and the electrodes were achieved with the help of electron- and ion-beam-assisted direct-write nanolithography processes. The stability of these nanomaterials was evaluated as function of time and applied current, showing that stable and reliable devices were obtained. Furthermore, the possibility of modulating their temperature using the integrated microheater placed in the membrane was also demonstrated, enabling these devices to be used in gas sensing procedures. We present a methodology and general strategy for the fabrication and characterization of portable and reliable nanowire-based devices.
机译：单独的SnO2纳米线被集成在基于悬浮微膜的自下而上的设备中。借助电子束和离子束辅助的直接写入纳米光刻工艺，纳米线与电极之间实现了电接触。这些纳米材料的稳定性作为时间和施加电流的函数进行了评估，表明获得了稳定可靠的器件。此外，还展示了使用放置在膜中的集成微型加热器调节其温度的可能性，从而使这些设备可用于气体传感程序。我们提出了一种便携式和可靠的基于纳米线的设备的制造和表征方法和一般策略。

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