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Templated assembly of metal nanoparticles in nanoimprinted patterns for metal nanowire fabrication

机译：用于金属纳米线制造的纳米压印图案中的金属纳米颗粒的模板组装

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摘要

We have developed a new method that combines nanoimprint lithography and metal nanoparticle solution processing for fabricating metal nanowires. A polymer template with nanoscale features, fabricated by nanoimprint lithography, provided physical reservoirs which were filled with a silver nanoparticle solution during the spin-coating. After the lift-off process, the defined silver nanoparticle patterns were annealed to enhance the conductivity for use as electrodes. Silver nanowire patterns (500 nm linewidth with a 300 nm gap) were fabricated without using an expensive high-vacuum system for metal deposition. This method demonstrated pattern resolution enhancement cdmpared with ink-jet printing which inherently suffers from ink spreading on the substrate surface. By using this method, organic thin film transistors composed of the solution-processed silver source/drain electrodes with a channel length of 300 nm were fabricated and showed comparable behaviors to those with vacuum-deposited electrodes.
机译：我们已经开发出一种结合纳米压印光刻技术和金属纳米粒子溶液处理技术来制造金属纳米线的新方法。通过纳米压印光刻技术制造的具有纳米级特征的聚合物模板提供了物理储层，该物理储层在旋涂过程中充满了银纳米颗粒溶液。在剥离工艺之后，将定义的银纳米颗粒图案退火以增强用作电极的电导率。无需使用昂贵的高真空系统进行金属沉积，即可制作出银纳米线图案（线宽为500 nm，间隙为300 nm）。该方法证明了与喷墨印刷相比的图案分辨率提高，喷墨印刷固有地遭受油墨在基材表面上扩散。通过使用这种方法，制造了由溶液处理的，沟道长度为300 nm的银源/漏电极组成的有机薄膜晶体管，并显示了与真空沉积电极相当的性能。

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