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A practical vacuum sensor based on a ZnO nanowire array

机译：基于ZnO纳米线阵列的实用真空传感器

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We report a practical vacuum pressure sensor based on a ZnO nanowire array (NWA). An oriented single-crystal ZnO NWA was synthesized by electrodeposition. The device consists of two ITO glass plates coated with a ZnO NWA. Scanning electron microscopy (SEM) and the x-ray diffraction (XRD) pattern show that the as-grown ZnO NWAs are single-crystal and roughly oriented with the ZnO(002) plane parallel to the substrate. Through measuring the pressure dependent resistance of the sensor at different gas species and temperatures, we discovered that the resistance increases monotonically with vacuum pressure. This demonstrates that a practical vacuum sensor could be fabricated since measurements were carried out with a normal multimeter, with no need for the high sensitivity and costly equipment as routinely required in nanotechnology for extremely weak signals. Measurement at elevated temperature (300 °C) showed that the vacuum sensor is much stabler and more sensitive to O _2 pressure. The principle of the device relates to the adsorbed oxygen species on the large surface area of a ZnO NWA to form a resistive depletion layer at the nanowire (NW) surface.
机译：我们报告了基于ZnO纳米线阵列（NWA）的实用真空压力传感器。通过电沉积合成了取向的单晶ZnO NWA。该设备由两个涂有ZnO NWA的ITO玻璃板组成。扫描电子显微镜（SEM）和X射线衍射（XRD）图谱显示，所生长的ZnO NWA是单晶的，并且其ZnO（002）平面平行于基板，大致取向。通过测量不同气体种类和温度下传感器的压力相关电阻，我们发现电阻随真空压力单调增加。这表明由于可以使用普通的万用表进行测量，因此可以制造出实用的真空传感器，而无需像纳米技术中对于微弱信号常规需要的高灵敏度和昂贵的设备。在高温（300°C）下进行的测量表明，真空传感器更加稳定并且对O _2压力更加敏感。该装置的原理涉及在ZnO NWA的大表面积上吸附的氧，从而在纳米线（NW）表面形成电阻耗尽层。

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